Abstract: A method of performing proximity correction of a mask layout is used during the generation of a masking structure for performing a processing step. The masking structure includes at least one opening that is delimited by a sidewall and that exposes an area that is to be processed. The method includes the steps of a) determining a value representing a flux of particles to a target portion, wherein the target portion is at least one of the group of a portion of the sidewall and a portion of the uncovered area and wherein the particles are generated during the processing of the area; and b) determining a corrected mask layout dependent on the value determined in step a).

Abstract: In one aspect, the invention provides a fabrication method. Before the fabrication of the structure, a mask layer, for example a hard mask, is applied to a layer. The mask layer has at least two layers composed of materials that can be etched selectively with respect to one another. In a first etching process, the structure is introduced into the layer. Subsequently, the first etching process is interrupted at a point in time in order to etch away a topmost layer of the hard mask selectively with respect to the underlying layer by means of a second etching process and, subsequently, the first etching process is continued for fabricating the structure with the new topmost layer.

Abstract: A floor or walkway has a base and an overlay on the base. The overlay includes a plurality of prefabricated tiles each of which has an upper layer designed to contact objects on the floor or walkway and a lower layer designed to bear against the base. The upper layers are composed of a ceramic while the lower layers are composed of a resilient material having anti-skid characteristics. The upper and lower layers of each tile are adhesively secured or vulcanized to one another during manufacture of the tile. The overlay is formed by simply placing the tile on the base or loosely securing the tiles to the base by means of an adhesive. If the overlay is outdoors, the same or gaps between neighboring tiles are kept open to permit water runoff. The lower layers of the tiles are then formed with drainage channels and/or open pores for the discharge of water which has passed through the seams or gaps.