Patents by Inventor Werner Muth

Werner Muth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of producing trench insulation in a substrate
    Patent number: 6720233
    Abstract: In a method of producing a trench insulation in a silicon substrate a first silicon-oxide layer is deposited on a front surface of a sequence of layers including the silicon substrate. Then the first silicon-oxide layer is structured so as to define a mask for a subsequent production of a trench. A trench is etched with a predetermined depth in the silicon substrate making use of the mask and filled with a silicon oxide. Then a first polysilicon layer is conformally deposited on the first silicon-oxide layer and on the oxide-filled trench. The first polysilicon layer is removed in such a way that a polysilicon cover remains on the oxide-filled trench, and the first silicon-oxide layer is removed.
    Type: Grant
    Filed: August 24, 1998
    Date of Patent: April 13, 2004
    Inventor: Werner Muth
  • PROCESS FOR PRODUCING TRENCH INSULATION IN A SUBSTRATE
    Publication number: 20020037626
    Abstract: In a method of producing a trench insulation in a silicon substrate a first silicon-oxide layer is deposited on a front surface of a sequence of layers including the silicon substrate. Then the first silicon-oxide layer is structured so as to define a mask for a subsequent production of a trench. A trench is etched with a predetermined depth in the silicon substrate making use of the mask and filled with a silicon oxide. Then a first polysilicon layer is conformally deposited on the first silicon-oxide layer and on the oxide-filled trench. The first polysilicon layer is removed in such a way that a polysilicon cover remains on the oxide-filled trench, and the first silicon-oxide layer is removed.
    Type: Application
    Filed: August 24, 1998
    Publication date: March 28, 2002
    Inventor: WERNER MUTH