Abstract: A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.

Abstract: A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.

Abstract: A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.

Abstract: A measuring probe for the measurement of the thickness of thin layers, includes a housing, at least one sensor element which is mounted with at least one spring element to be flexible with respect to the housing, the sensor element having a spherical positioning cap pointing towards the measuring surface of an object of measurement against a touchdown direction and along a longitudinal axis thereof, and an attenuating device on the housing which acts in the touchdown direction of the at least one sensor element before the sensor element is fitted onto the measuring surface of the object of measurement and attenuates the touchdown movement of the at least one sensor element in the direction of the measuring surface of the object of measurement.

Abstract: The invention relates to a device to position and align a rotationally-symmetrical body (28) with respect to a measuring device (19) for the implementation of a measurement on the rotationally-symmetrical body (28), having a basic element (24) which has a contact surface (22) on a pin (23) or is allocated to a contact surface (22) on which the rotationally-symmetrical body (28) is supported for the implementation of the measurement, wherein a positioning element (41) which can be moved relative to the contact surface (22) is provided on the basic element (24), said positioning element (41) comprising a prismatic receiver (64), wherein the contact surface (22) is positioned within the prismatic receiver (64) or abuts on this and a movement path of the positioning element (41) towards the basic element (22) corresponds at least to the height of the prismatic receiver (64).

Abstract: The invention relates to a vacuum chuck for clamping workpieces (19), in particular wafers, and a measuring device and a method for checking workpieces, in particular wafers, by means of X-ray fluorescent radiation.

Abstract: The invention relates to a measuring probe for measuring the thickness of thin films, comprising a housing (12) and at least one sensor element (14, 15), which is supported resiliently with respect to the housing (12) by means of at least one spring element (33, 37) and has a contacting spherical cap (31) pointing opposite the contacting direction and along the longitudinal axis (38) of the sensor element toward the measurement surface (25) of a measurement object (26), wherein a damping device (17) is provided on the housing (12), which damping device acts in the contacting direction (28) of the at least one sensor element (14, 15) before the sensor element (14, 15) contacts the measurement surface (25) of the measurement object (26) and damps the contacting motion of the at least one sensor element (14, 15) in the direction toward the measurement surface (25) of the measurement object (26).

Abstract: The invention relates to a device to position and align a rotationally-symmetrical body (28) with respect to a measuring device (19) for the implementation of a measurement on the rotationally-symmetrical body (28), having a basic element (24) which has a contact surface (22) on a pin (23) or is allocated to a contact surface (22) on which the rotationally-symmetrical body (28) is supported for the implementation of the measurement, wherein a positioning element (41) which can be moved relative to the contact surface (22) is provided on the basic element (24), said positioning element (41) comprising a prismatic receiver (64), wherein the contact surface (22) is positioned within the prismatic receiver (64) or abuts on this and a movement path of the positioning element (41) towards the basic element (22) corresponds at least to the height of the prismatic receiver (64).

Abstract: A tube arrangement has a first partial tube and a second partial tube, and one fine adjustment arrangement for coaxially displacing the partial tubes with respect to one another. The partial tubes, an aperture ring with a small aperture opening, a beta radiator point source and a GM-counter are coaxially arranged. The partial tubes are connected each with one or two of the following: an aperture ring, the beta radiator point source, and the GM-counter. A blocking means blocks the fine adjustment arrangement. One of the partial tubes is connected galvanically conducting with the GM-counter anode and the other partial tubes are connected galvanically conducting with the GM-counter cathode.

Abstract: A regulator apparatus controlled by spring tension, such as a centrifugal governor for internal combustion engines wherein the spring characteristic of the regulator spring remains unchanged during operation and a regulator effectiveness which remains the same over a long period of time is attainable and which includes at least one compression spring acting as the regulator spring and inserted between two supports as well as an actuation member to transfer those regulator motions which tend to cause a change in length of the spring over onto the first spring end, which actuation member can tilt about a transverse shaft disposed perpendicularly to the longitudinal axis of the spring, the compression spring intentionally inserted into an installed position such that a point on the front face of the appropriate spring end, which point transfers the largest spring force component onto the spring support associated with the tiltable actuation member lies in a plane extending parallel to the longitudinal shaft of t