Patents by Inventor Wesley C. Nazle

Wesley C. Nazle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selective deposition of germanium spacers on nitride
    Patent number: 7888241
    Abstract: A method of selectively forming a germanium structure within semiconductor manufacturing processes removes the native oxide from a nitride surface in a chemical oxide removal (COR) process and then exposes the heated nitride and oxide surface to a heated germanium containing gas to selectively form germanium only on the nitride surface but not the oxide surface.
    Type: Grant
    Filed: June 9, 2008
    Date of Patent: February 15, 2011
    Assignee: International Business Machines Corporation
    Inventors: Ashima B. Chakravarti, Anthony I. Chou, Toshiharu Furukawa, Steven J. Holmes, Wesley C. Nazle