Patents by Inventor Wesley George Lau

Wesley George Lau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning process residues from substrate processing chamber components
    Patent number: 8118946
    Abstract: A component from a substrate processing chamber which has plasma process residues on both its internal and external surfaces, is removed from the processing chamber, and transferred to a cleaning chamber. The component is exposed to an energized cleaning gas in the cleaning chamber, and the cleaning gas is exhausted from below the component so that the cleaning gas cleans off the residues on both the internal and external surfaces of the component. It has been determined that the cleaning gas can also repair surface defects in the component.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: February 21, 2012
    Inventor: Wesley George Lau
  • REPAIRING SURFACE DEFECTS AND CLEANING RESIDUES FROM PLASMA CHAMBER COMPONENTS
    Publication number: 20090139540
    Abstract: A component from a substrate processing chamber which has plasma process residues on both its internal and external surfaces, is removed from the processing chamber, and transferred to a cleaning chamber. The component is exposed to an energized cleaning gas in the cleaning chamber, and the cleaning gas is exhausted from below the component so that the cleaning gas cleans off the residues on both the internal and external surfaces of the component. It has been determined that the cleaning gas can also repair surface defects in the component.
    Type: Application
    Filed: November 30, 2007
    Publication date: June 4, 2009
    Applicant: Applied Materials, Inc.
    Inventor: Wesley George Lau