Abstract: Provided herein are developer solutions useful in producing semiconductor-based circuit elements or precursors thereof, which contain tris-(2-hydroxyethyl)methylammonium hydroxide. Developers according to the invention are either aqueous or alcoholic solutions of tris-(2-hydroxyethyl)methylammonium hydroxide which preferably further comprise a stabilizer. Through use of the compositions provided herein, greatly reduced levels of volatile amines are released during the developing process which lessens the burden on clean room atmosphere purification equipment owing to lessened airborne impurities.

Abstract: A method is provided for the preparation of tertiary polyamines by alkylating a polyamine having at least two primary amino groups without the use of excess solvent. More particularly, a tertiary amine is produced by reductively alkylating a polyamine with a carbonyl compound, such as formaldehyde, in a reaction zone while in the presence of a hydrogenation catalyst and hydrogen under reductive conditions. The carbonyl compound is continuously supplied to the reaction zone.