Abstract: The invention relates to inlet elements at disposal devices for process exhaust gases containing pollutants, as are produced in particular in semiconductor component fabrication. The solution is intended to make it possible to avoid deposits in the inlet region for process exhaust gases at disposal devices. To achieve this object, the inlet elements according to the invention are designed in such a way that a porous, gas-permeable wall element, via which an inert gas can be fed into the interior of the inlet element routing process exhaust gas, is present at the inlet element.

Abstract: In a device for the purification of exhaust gases, especially exhaust gases consisting of fluorine-containing compounds, bore holes (7,8) are made in a ring burner (5) for the separate supply of combustion gas and oxygen on a single hole circle around a central exhaust gas supply (9). The ring burner is arranged in a combustion chamber (1). The combustion chamber is closed up to an annular gap (20) between a cylindrical jacket (4) and a front face (16). Additional oxygen or additional air is introduced into the annular gap (20).

Abstract: The invention relates to an apparatus for the thermal treatment of process exhaust gases containing pollutants, which can be used for a very wide range of surface modification processes carried out under a vacuum. The intention is to achieve the object of thermally treating process exhaust gases containing pollutants in such a way that accumulations of particles on the inner wall of a combustion chamber and an undesirable adverse effect on the thermal conversion can be avoided with little outlay.

Abstract: Exhaust gases from CVD and plasma processes contain toxic pollutants, particularly fluorine-containing compounds, and must therefore be purified. In a device for the purification of exhaust gases, frequently one comprising a combustion chamber and a fuel gas flame, the pollutants are converted by means of a thermally activated, chemical reaction. A special design of the combustion chamber and the burner improves the economy of the exhaust gas purification process and, above all, reduces the amount of nitrogen oxide contained in the purified exhaust gas. To this end, it is ensured that a flame having a reducing effect over its entire cross section forms in the burner by separately supplying fuel gas and oxygen in an alternate manner into drill holes arranged on a single hole circle and by sealing the combustion chamber such that no additional air is supplied to the vicinity of the burner.

Abstract: The invention relates to an apparatus and a process for the separation of particles from thermally after-treated process offgases which are obtained, in particular, in the surface modification of various substrates in vacuum units. The invention provides, in accordance with its object, an inexpensive and effective way of carrying out the separation of very small solid particles present in thermally after-treated process offgases. The apparatus of the invention is configured so that the process offgases which have been thermally after-treated in combustion chambers are conveyed via a cooler through an agglomeration stage and solid particles present in the after-treated process offgas can be separated off in a scrubbing stage.

Abstract: The invention relates to inlet elements at disposal devices for process exhaust gases containing pollutants, as are produced in particular in semiconductor component fabrication. The solution is intended to make it possible to avoid deposits in the inlet region for process exhaust gases at disposal devices. To achieve this object, the inlet elements according to the invention are designed in such a way that a porous, gas-permeable wall element, via which an inert gas can be fed into the interior of the inlet element routing process exhaust gas, is present at the inlet element.

Abstract: The invention relates to an apparatus for the thermal treatment of process exhaust gases containing pollutants, which can be used in particular for a very wide range of surface modification processes carried out under a vacuum. The intention is to achieve the object of thermally treating process exhaust gases containing pollutants in such a way that accumulations of particles on the inner wall of a combustion chamber and an undesirable adverse effect on the thermal conversion can be avoided with little outlay. In a combustion chamber of the apparatus according to the invention, at least one burner with a process exhaust gas feed is arranged at the top cover of the combustion chamber. Furthermore, there is a feed for washing liquid, which forms a film for the removal of particles on the inner wall of the combustion chamber, and a discharge for exhaust gas and washing liquid arranged at the base.