Abstract: The embodiments disclosed herein relate to an electrostatic chuck, or an optically structured element or an optical mask that comprise a metal film as well as a transparent cover applied on a substrate. At least two anti-reflective films are inserted between the metal film and the cover that reduce the reflectance of the metal film, as viewed from the surface, to almost zero. As a result, a direct interferometer measurement of the surface structure of the transparent cover is possible. Methods of measurement and of use are also disclosed.

Abstract: The invention relates to a device for the contactless detection of a three-dimensional contour, comprising a projector with an imaging element and a projection lens for depicting a stripe pattern that is generated on the imaging element in an object space. The invention further comprises a camera arrangement for the surveillance of the object space from two different directions, having two camera lenses. The projector and the camera arrangement are housed together in a measurement head that can be handheld. The invention further relates to a method for detecting a three-dimensional contour using said device.