Patents by Inventor Wilbert G. H. van den Hoek

Wilbert G. H. van den Hoek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for electrically planarizing semiconductor wafers
    Patent number: 6756307
    Abstract: The present invention pertains to apparatus and methods for electroplanarization of metal surfaces having both recessed and raised features, over a large range of feature sizes. The invention accomplishes this by use of a flexible planar cathode and a spacing pad thereon. Methods of the invention are electropolishing methods. During electroplanarization, the flexible planar cathode conforms to the global contour of the work piece (e.g. a wafer) while the spacing pad conforms to local topography of the metal layer being planarized. In this way, dishing is reduced in the final planarized metal layer.
    Type: Grant
    Filed: July 29, 2002
    Date of Patent: June 29, 2004
    Assignee: Novellus Systems, Inc.
    Inventors: John Kelly, Wilbert G. H. van den Hoek, John S. Drewery