Patents by Inventor Wilbur Jordan Reichmann, II

Wilbur Jordan Reichmann, II has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp
    Patent number: 9348236
    Abstract: An electrostatic clamp for use in a lithographic apparatus includes burls and an electrode surrounded by an insulator and/or a dielectric material between adjacent burls. In an embodiment, two or more layers of dielectric material are provided between adjacent burls and surround an electrode provided between adjacent burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: May 24, 2016
    Assignee: ASML HOLDING N.V.
    Inventors: Peter Richard Helmus, Matthew Lipson, Ronald A. Wilklow, James Kennon, Kennard White, Wilbur Jordan Reichmann, II
  • ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING AN ELECTROSTATIC CLAMP
    Publication number: 20130308116
    Abstract: An electrostatic clamp for use in a lithographic apparatus includes burls and an electrode surrounded by an insulator and/or a dielectric material between adjacent burls. In an embodiment, two or more layers of dielectric material are provided between adjacent burls and surround an electrode provided between adjacent burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.
    Type: Application
    Filed: September 21, 2011
    Publication date: November 21, 2013
    Applicant: ASML Holding N.V.
    Inventors: Peter Richard Helmus, Matthew Lipson, Ronald A. Wilklow, James Kennon, Kennard White, Wilbur Jordan Reichmann, II