Patents by Inventor Wilfried Ernst-August Haensch

Wilfried Ernst-August Haensch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10243562
    Abstract: A voltage shifting circuit includes a first transistor in electrical parallel with a second transistor between an input node and an output node; a gate threshold capacitor disposed between the output node and a gate of the second transistor; and at least one of a) a downshift capacitor disposed between the input node and a drain/source of the first transistor, arranged to downshift a voltage from the input node and apply the downshifted voltage to the drain/source of the first transistor; and b) an upshift capacitor disposed between the input node and a drain/source of the second transistor, arranged to upshift a voltage from the input node and apply the upshifted voltage to the drain/source of the second transistor. This circuit is advantageously directly coupled to an input or output node of a non-complementary logic gate, of which multiple instances can be deployed in display circuitry or solar panels.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: March 26, 2019
    Assignee: International Business Machines Corporation
    Inventors: Wilfried Ernst-August Haensch, Bahman Hekmatshoartabari
  • Publication number: 20180248550
    Abstract: A voltage shifting circuit includes a first transistor in electrical parallel with a second transistor between an input node and an output node; a gate threshold capacitor disposed between the output node and a gate of the second transistor; and at least one of a) a downshift capacitor disposed between the input node and a drain/source of the first transistor, arranged to downshift a voltage from the input node and apply the downshifted voltage to the drain/source of the first transistor; and b) an upshift capacitor disposed between the input node and a drain/source of the second transistor, arranged to upshift a voltage from the input node and apply the upshifted voltage to the drain/source of the second transistor. This circuit is advantageously directly coupled to an input or output node of a non-complementary logic gate, of which multiple instances can be deployed in display circuitry or solar panels.
    Type: Application
    Filed: February 28, 2017
    Publication date: August 30, 2018
    Inventors: Wilfried Ernst-August Haensch, Bahman Hekmatshoartabari
  • Patent number: 9548385
    Abstract: Semiconductor devices having vertical field effect transistors with self-aligned source and drain contacts are provided, as well as methods for fabricating vertical field effect transistors with self-aligned source and drain contacts.
    Type: Grant
    Filed: February 11, 2016
    Date of Patent: January 17, 2017
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Wilfried Ernst-August Haensch, Ali Khakifirooz, Davood Shahrjerdi
  • Patent number: 9385050
    Abstract: A structure comprises first and at least second fin structures are formed. Each of the first and at least second fin structures has a vertically oriented semiconductor body. The vertically oriented semiconductor body is comprised of vertical surfaces. A doped region in each of the first and at least second fin structures is comprised of a concentration of dopant ions present in the semiconductor body to form a first resistor and at least a second resistor, and a pair of merged fins formed on outer portions of the doped regions of the first and at least second fin structures. The pair of merged fins is electrically connected so that the first and at least second resistors are electrically connected in parallel with each other.
    Type: Grant
    Filed: January 6, 2011
    Date of Patent: July 5, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Wilfried Ernst-August Haensch, Pranita Kulkarni, Tenko Yamashita
  • Patent number: 9312383
    Abstract: Semiconductor devices having vertical field effect transistors with self-aligned source and drain contacts are provided, as well as methods for fabricating vertical field effect transistors with self-aligned source and drain contacts.
    Type: Grant
    Filed: August 12, 2015
    Date of Patent: April 12, 2016
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Wilfried Ernst-August Haensch, Ali Khakifirooz, Davood Shahrjerdi
  • Patent number: 9246113
    Abstract: A dense binary memory switch device combines the function of a pass transistor and a memory cell and has low programming and operation voltages. The device includes a charge storage region coupled to a gate electrode through a gate dielectric layer and directly contacting a channel region. The charge storage region contains quantum structures, deep traps or combinations thereof and is charged by carriers injected from injection regions that are in direct contact with the charge storage region. Fabrication of the device at low temperatures compatible with back-end-of-line processing is further disclosed.
    Type: Grant
    Filed: February 14, 2014
    Date of Patent: January 26, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Tze-Chiang Chen, Kailash Gopalakrishnan, Wilfried Ernst-August Haensch, Bahman Hekmatshoartabari
  • Patent number: 9245896
    Abstract: A dense binary memory switch device combines the function of a pass transistor and a memory cell and has low programming and operation voltages. The device includes a charge storage region coupled to a gate electrode through a gate dielectric layer and to a channel region through another dielectric layer. The charge storage region is charged by carriers injected from injection regions that are in direct contact with the charge storage region. Fabrication of the device at low temperatures compatible with back-end-of-line processing is further disclosed.
    Type: Grant
    Filed: February 14, 2014
    Date of Patent: January 26, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ali Afzali-Ardakani, Tze-Chiang Chen, Kailash Gopalakrishnan, Wilfried Ernst-August Haensch, Bahman Hekmatshoartabari
  • Publication number: 20150236029
    Abstract: A dense binary memory switch device combines the function of a pass transistor and a memory cell and has low programming and operation voltages. The device includes a charge storage region coupled to a gate electrode through a gate dielectric layer and to a channel region through another dielectric layer. The charge storage region is charged by carriers injected from injection regions that are in direct contact with the charge storage region. Fabrication of the device at low temperatures compatible with back-end-of-line processing is further disclosed.
    Type: Application
    Filed: February 14, 2014
    Publication date: August 20, 2015
    Applicant: International Business Machines Corporation
    Inventors: Ali Afzali-Ardakani, Tze-Chiang Chen, Kailash Gopalakrishnan, Wilfried Ernst-August Haensch, Bahman Hekmatshoartabari
  • Publication number: 20150236284
    Abstract: A dense binary memory switch device combines the function of a pass transistor and a memory cell and has low programming and operation voltages. The device includes a charge storage region coupled to a gate electrode through a gate dielectric layer and directly contacting a channel region. The charge storage region contains quantum structures, deep traps or combinations thereof and is charged by carriers injected from injection regions that are in direct contact with the charge storage region. Fabrication of the device at low temperatures compatible with back-end-of-line processing is further disclosed.
    Type: Application
    Filed: February 14, 2014
    Publication date: August 20, 2015
    Applicant: International Business Machines Corporation
    Inventors: Kevin K. Chan, Tze-Chiang Chen, Kailash Gopalakrishnan, Wilfried Ernst-August Haensch, Bahman Hekmatshoartabari
  • Patent number: 9064748
    Abstract: Transistor devices having a self-aligned gate structure on transparent substrates and techniques for fabrication thereof are provided. In one aspect, a method of fabricating a transistor device includes the following steps. A channel material is formed on a transparent substrate. Source and drain electrodes are formed in contact with the channel material. A dielectric layer is deposited on the channel material. A photoresist is deposited on the dielectric layer and developed using UV light exposure through the transparent substrate. A gate metal(s) is deposited on the exposed portions of the dielectric layer and the undeveloped portions of the photoresist. The undeveloped portions of the photoresist are removed along with portions of the gate metal over the source and drain regions to form a gate of the device on the dielectric layer over the channel material which is self-aligned to the source and drain electrodes.
    Type: Grant
    Filed: July 3, 2014
    Date of Patent: June 23, 2015
    Assignee: International Business Machines Corporation
    Inventors: Wilfried Ernst-August Haensch, Zihong Liu
  • Patent number: 8969965
    Abstract: FinFET devices and methods for the fabrication thereof are provided. In one aspect, a method for fabricating a FET device includes the following steps. A wafer is provided having an active layer on an insulator. A plurality of fin hardmasks are patterned on the active layer. A dummy gate is placed over a central portion of the fin hardmasks. One or more doping agents are implanted into source and drain regions of the device. A dielectric filler layer is deposited around the dummy gate. The dummy gate is removed to form a trench in the dielectric filler layer. The fin hardmasks are used to etch a plurality of fins in the active layer within the trench. The doping agents are activated. A replacement gate is formed in the trench, wherein the step of activating the doping agents is performed before the step of forming the replacement gate.
    Type: Grant
    Filed: January 7, 2014
    Date of Patent: March 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Josephine B. Chang, Michael A. Guillorn, Wilfried Ernst-August Haensch
  • Publication number: 20140312298
    Abstract: Transistor devices having a self-aligned gate structure on transparent substrates and techniques for fabrication thereof are provided. In one aspect, a method of fabricating a transistor device includes the following steps. A channel material is formed on a transparent substrate. Source and drain electrodes are formed in contact with the channel material. A dielectric layer is deposited on the channel material. A photoresist is deposited on the dielectric layer and developed using UV light exposure through the transparent substrate. A gate metal(s) is deposited on the exposed portions of the dielectric layer and the undeveloped portions of the photoresist. The undeveloped portions of the photoresist are removed along with portions of the gate metal over the source and drain regions to form a gate of the device on the dielectric layer over the channel material which is self-aligned to the source and drain electrodes.
    Type: Application
    Filed: July 3, 2014
    Publication date: October 23, 2014
    Inventors: Wilfried Ernst-August Haensch, Zihong Liu
  • Patent number: 8802514
    Abstract: Transistor devices having a self-aligned gate structure on transparent substrates and techniques for fabrication thereof are provided. In one aspect, a method of fabricating a transistor device includes the following steps. A channel material is formed on a transparent substrate. Source and drain electrodes are formed in contact with the channel material. A dielectric layer is deposited on the channel material. A photoresist is deposited on the dielectric layer and developed using UV light exposure through the transparent substrate. A gate metal(s) is deposited on the exposed portions of the dielectric layer and the undeveloped portions of the photoresist. The undeveloped portions of the photoresist are removed along with portions of the gate metal over the source and drain regions to form a gate of the device on the dielectric layer over the channel material which is self-aligned to the source and drain electrodes.
    Type: Grant
    Filed: October 21, 2013
    Date of Patent: August 12, 2014
    Assignee: International Business Machines Corporation
    Inventors: Wilfried Ernst-August Haensch, Zihong Liu
  • Publication number: 20140117464
    Abstract: FinFET devices and methods for the fabrication thereof are provided. In one aspect, a method for fabricating a FET device includes the following steps. A wafer is provided having an active layer on an insulator. A plurality of fin hardmasks are patterned on the active layer. A dummy gate is placed over a central portion of the fin hardmasks. One or more doping agents are implanted into source and drain regions of the device. A dielectric filler layer is deposited around the dummy gate. The dummy gate is removed to form a trench in the dielectric filler layer. The fin hardmasks are used to etch a plurality of fins in the active layer within the trench. The doping agents are activated. A replacement gate is formed in the trench, wherein the step of activating the doping agents is performed before the step of forming the replacement gate.
    Type: Application
    Filed: January 7, 2014
    Publication date: May 1, 2014
    Applicant: International Business Machines Corporation
    Inventors: Josephine B. Chang, Michael A. Guillorn, Wilfried Ernst-August Haensch
  • Publication number: 20140042393
    Abstract: Transistor devices having a self-aligned gate structure on transparent substrates and techniques for fabrication thereof are provided. In one aspect, a method of fabricating a transistor device includes the following steps. A channel material is formed on a transparent substrate. Source and drain electrodes are formed in contact with the channel material. A dielectric layer is deposited on the channel material. A photoresist is deposited on the dielectric layer and developed using UV light exposure through the transparent substrate. A gate metal(s) is deposited on the exposed portions of the dielectric layer and the undeveloped portions of the photoresist. The undeveloped portions of the photoresist are removed along with portions of the gate metal over the source and drain regions to form a gate of the device on the dielectric layer over the channel material which is self-aligned to the source and drain electrodes.
    Type: Application
    Filed: October 21, 2013
    Publication date: February 13, 2014
    Applicant: International Business Machines Corporation
    Inventors: Wilfried Ernst-August Haensch, Zihong Liu
  • Patent number: 8637359
    Abstract: FinFET devices and methods for the fabrication thereof are provided. In one aspect, a method for fabricating a FET device includes the following steps. A wafer is provided having an active layer on an insulator. A plurality of fin hardmasks are patterned on the active layer. A dummy gate is placed over a central portion of the fin hardmasks. One or more doping agents are implanted into source and drain regions of the device. A dielectric filler layer is deposited around the dummy gate. The dummy gate is removed to form a trench in the dielectric filler layer. The fin hardmasks are used to etch a plurality of fins in the active layer within the trench. The doping agents are activated. A replacement gate is formed in the trench, wherein the step of activating the doping agents is performed before the step of forming the replacement gate.
    Type: Grant
    Filed: June 10, 2011
    Date of Patent: January 28, 2014
    Assignee: International Business Machines Corporation
    Inventors: Josephine B. Chang, Michael A. Guillorn, Wilfried Ernst-August Haensch
  • Patent number: 8569121
    Abstract: Transistor devices having a self-aligned gate structure on transparent substrates and techniques for fabrication thereof are provided. In one aspect, a method of fabricating a transistor device includes the following steps. A channel material is formed on a transparent substrate. Source and drain electrodes are formed in contact with the channel material. A dielectric layer is deposited on the channel material. A photoresist is deposited on the dielectric layer and developed using UV light exposure through the transparent substrate. A gate metal(s) is deposited on the exposed portions of the dielectric layer and the undeveloped portions of the photoresist. The undeveloped portions of the photoresist are removed along with portions of the gate metal over the source and drain regions to form a gate of the device on the dielectric layer over the channel material which is self-aligned to the source and drain electrodes.
    Type: Grant
    Filed: November 1, 2011
    Date of Patent: October 29, 2013
    Assignee: International Business Machines Corporation
    Inventors: Wilfried Ernst-August Haensch, Zihong Liu
  • Publication number: 20130105765
    Abstract: Transistor devices having a self-aligned gate structure on transparent substrates and techniques for fabrication thereof are provided. In one aspect, a method of fabricating a transistor device includes the following steps. A channel material is formed on a transparent substrate. Source and drain electrodes are formed in contact with the channel material. A dielectric layer is deposited on the channel material. A photoresist is deposited on the dielectric layer and developed using UV light exposure through the transparent substrate. A gate metal(s) is deposited on the exposed portions of the dielectric layer and the undeveloped portions of the photoresist. The undeveloped portions of the photoresist are removed along with portions of the gate metal over the source and drain regions to form a gate of the device on the dielectric layer over the channel material which is self-aligned to the source and drain electrodes.
    Type: Application
    Filed: November 1, 2011
    Publication date: May 2, 2013
    Applicant: International Business Machines Corporation
    Inventors: Wilfried Ernst-August Haensch, Zihong Liu
  • Publication number: 20120313170
    Abstract: FinFET devices and methods for the fabrication thereof are provided. In one aspect, a method for fabricating a FET device includes the following steps. A wafer is provided having an active layer on an insulator. A plurality of fin hardmasks are patterned on the active layer. A dummy gate is placed over a central portion of the fin hardmasks. One or more doping agents are implanted into source and drain regions of the device. A dielectric filler layer is deposited around the dummy gate. The dummy gate is removed to form a trench in the dielectric filler layer. The fin hardmasks are used to etch a plurality of fins in the active layer within the trench. The doping agents are activated. A replacement gate is formed in the trench, wherein the step of activating the doping agents is performed before the step of forming the replacement gate.
    Type: Application
    Filed: June 10, 2011
    Publication date: December 13, 2012
    Applicant: International Business Machines Corporation
    Inventors: Josephine B. Chang, Michael A. Guillom, Wilfried Ernst-August Haensch
  • Patent number: 8053317
    Abstract: Method of forming a semiconductor device which includes the steps of obtaining a semiconductor substrate having a logic region and an STI region; sequentially depositing layers of high K material, metal gate, first silicon and hardmask; removing the hardmask and first silicon layers from the logic region; applying a second layer of silicon on the semiconductor substrate such that the logic region has layers of high K material, metal gate and second silicon and the STI region has layers of high K material, metal gate, first silicon, hardmask and second silicon. There may also be a second hardmask layer between the metal gate layer and the first silicon layer in the STI region. There may also be a hardmask layer between the metal gate layer and the first silicon layer in the STI region but no hardmask layer between the first and second layers of silicon in the STI region.
    Type: Grant
    Filed: August 15, 2009
    Date of Patent: November 8, 2011
    Assignee: International Business Machines Corporation
    Inventors: Satya N. Chakravarti, Dechao Guo, Wilfried Ernst-August Haensch, Pranita Kulkarni, Fei Liu, Philip J. Oldiges, Keith Kwong Hon Wong