Patents by Inventor Wilheim Scheffels

Wilheim Scheffels has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4358657
    Abstract: A system for sealing the working vacuum chamber of a charged particle beam machine which is movable with respect to a workpiece is disclosed. The system includes a housing with a central compartment having wire-shaped elements urged against the workpiece to provide a seal therebetween, and lateral compartments, each having a packing of sealing material which is biased against the workpiece surface of a spring arrangement. Rollers and a flexible lip seal arrangement having a flexible sheath of synthetic rubber are also disclosed.
    Type: Grant
    Filed: October 14, 1980
    Date of Patent: November 9, 1982
    Assignee: Messer Griesheim GmbH
    Inventors: Karl-Heinz Steigerwald, Peter Anderl, Erwin Kappelsberger, Clauspeter Monch, Dieter Konig, Wilheim Scheffels