Patents by Inventor Wilhelm Egle
Wilhelm Egle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20110211180Abstract: An optical component includes an optical element, a mount for the optical element, and a temperature control device configured to control a temperature of a part of the mount based on at least one parameter selected from the group consisting of a coefficient of expansion of a substrate of the optical element, and a coefficient of expansion of a material of the mount.Type: ApplicationFiled: May 10, 2011Publication date: September 1, 2011Applicant: CARL ZEISS SMT GMBHInventors: Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt
-
Patent number: 7965456Abstract: An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.Type: GrantFiled: September 30, 2008Date of Patent: June 21, 2011Assignee: Carl Zeiss SMT GmbHInventors: Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt
-
Patent number: 7483223Abstract: An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.Type: GrantFiled: October 6, 2005Date of Patent: January 27, 2009Assignee: Carl Zeiss SMT AGInventors: Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt
-
Publication number: 20090021950Abstract: An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.Type: ApplicationFiled: September 30, 2008Publication date: January 22, 2009Inventors: Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt
-
Patent number: 7460212Abstract: There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.Type: GrantFiled: July 3, 2007Date of Patent: December 2, 2008Assignee: Carl-Zeiss SMT AGInventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
-
Patent number: 7410265Abstract: A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1?) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1?) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.Type: GrantFiled: September 30, 2003Date of Patent: August 12, 2008Assignee: Carl Zeiss Smt AgInventors: Martin Antoni, Frank Melzer, Andreas Seifert, Wolfgang Singer, Wilhelm Egle, Bernhard Gellrich, Bernhard Geuppert
-
Publication number: 20080099935Abstract: A method of making a high-precision optical surface which may be used either as a Wolter-type segment in an X-ray mirror system or in a collector of a EUVL system or as a spherical, aspherical, or free form normal or grazing incidence mirror in an EUVL system is prepared by sagging a thin flat glass sheet onto a masterpiece, in particular a mandrel, made from a temperature-resistant material, such as an alumina based ceramic or a keatite glass ceramic. The glass sheet is polished to the desired surface roughness (14), is positioned to an upper surface of the masterpiece (16), and is heated (18) to effect sagging onto the upper surface of the masterpiece for generating a shaped body. Thereafter, the shaped body is cooled and removed from the masterpiece, is mounted within a holder (22), is inspected for deviations from the specification (24) preferably using interferometric measurements, and is corrected for defects (26), preferably using ion beam figuring.Type: ApplicationFiled: November 8, 2005Publication date: May 1, 2008Inventors: Wilhelm Egle, Udo Dinger, Axel Matthes
-
Publication number: 20080042079Abstract: There is provided a system that includes a first optical sub-system contained in a first space, and a second optical sub-system contained in a second space. The first and said second spaces are separated by a structure selected from the group consisting of a diaphragm and a valve.Type: ApplicationFiled: October 16, 2007Publication date: February 21, 2008Applicant: Carl Zeiss SMTInventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek, Johannes Wangler, Frank Melzer, Bernhard Gellrich, Bernhard Geuppert, Erich Schubert, Martin Antoni
-
Patent number: 7321126Abstract: There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ?193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.Type: GrantFiled: May 2, 2006Date of Patent: January 22, 2008Assignee: Carl Zeiss SMT AGInventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek, Johannes Wangler, Frank Melzer, Bernhard Gellrich, Bernhard Geuppert, Erich Schubert, Martin Antoni
-
Publication number: 20080013680Abstract: There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.Type: ApplicationFiled: July 3, 2007Publication date: January 17, 2008Applicant: Carl Zeiss SMT AGInventors: Wolfgang Singer, Wilhelm Egle, Markus Wiess, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
-
Patent number: 7244954Abstract: There is provided a collector for illumination systems for light having a wavelength ?193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.Type: GrantFiled: October 4, 2005Date of Patent: July 17, 2007Assignee: Carl Zeiss SMT AGInventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
-
Publication number: 20060291062Abstract: There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength 193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.Type: ApplicationFiled: May 2, 2006Publication date: December 28, 2006Inventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek, Johannes Wangler, Frank Melzer, Bernhard Gellrich, Bernhard Geuppert, Erich Schubert, Martin Antoni
-
Patent number: 7091505Abstract: There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ?193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.Type: GrantFiled: February 9, 2004Date of Patent: August 15, 2006Assignee: Carl Zeiss SMT AGInventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek, Johannes Wangler, Frank Melzer, Bernhard Gellrich, Bernhard Geuppert, Erich Schubert, Martin Antoni
-
Publication number: 20060097202Abstract: There is provided a collector for illumination systems for light having a wavelength ?193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.Type: ApplicationFiled: October 4, 2005Publication date: May 11, 2006Inventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
-
Publication number: 20060093253Abstract: An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.Type: ApplicationFiled: October 6, 2005Publication date: May 4, 2006Inventors: Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt
-
Patent number: 7015489Abstract: There is provided a collector for illumination systems for light having a wavelength ?193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.Type: GrantFiled: July 23, 2003Date of Patent: March 21, 2006Assignee: Carl Zeiss SMT AGInventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
-
Patent number: 6927403Abstract: There is provided an illumination system for wavelengths of ?193 nm. The illumination system includes an object plane, a plane conjugated to the object plane, a first collector between the object plane and the conjugated plane, and a second collector after the conjugated plane. The first collector focuses a beam bundle of rays from the object plane in the conjugated plane. At least one of the first and second collectors includes a mirror shell. The rays strike the mirror shell at an angle of incidence of less than 20° relative to a surface tangent of the mirror shell.Type: GrantFiled: August 9, 2002Date of Patent: August 9, 2005Assignees: Carl Zeiss SMT AG, ASML Lithography B.V.Inventors: Wolfgang Singer, Martin Antoni, Johannes Wangler, Wilhelm Egle, Vadim Yevgenyevich Banine, Erik Roelof Loopstra
-
Publication number: 20040227103Abstract: There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ≦193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.Type: ApplicationFiled: February 9, 2004Publication date: November 18, 2004Applicant: Carl Zeiss SMT AGInventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek, Johannes Wangler, Frank Melzer, Bernhard Gellrich, Bernhard Geuppert, Erich Schubert, Martin Antoni
-
Publication number: 20040065817Abstract: There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.Type: ApplicationFiled: July 23, 2003Publication date: April 8, 2004Applicant: Carl Zeiss SMT AGInventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
-
Publication number: 20030095623Abstract: There is provided an illumination system for wavelengths of ≦193 nm. The illumination system includes an object plane, a plane conjugated to the object plane, a first collector between the object plane and the conjugated plane, and a second collector after the conjugated plane. The first collector focuses a beam bundle of rays from the object plane in the conjugated plane. At least one of the first and second collectors includes a mirror shell. The rays strike the mirror shell at an angle of incidence of less than 20° relative to a surface tangent of the mirror shell.Type: ApplicationFiled: August 9, 2002Publication date: May 22, 2003Inventors: Wolfgang Singer, Martin Antoni, Johannes Wangler, Wilhelm Egle, Vadim Yevgenyevich Banine, Erik Roelof Loopstra