Abstract: A radiation sensor for use with a lithographic apparatus is disclosed, the radiation sensor comprising a radiation-sensitive material which converts incident radiation of wavelength ?1 into secondary radiation; and sensing means capable of detecting the secondary radiation emerging from said layer.

Abstract: Disclosed is a hydrogen storage material comprising a magnesium hydride. Said magnesium is stabilized in the fluorite structure. Preferably, the magnesium is at least partly substituted by an element such that the magnesium hydride is stabilized in the fluorite structure. In an advantageous embodiment, the hydrogen storage material also comprises a catalytically active material. Furthermore, an electrochemically active material, as well as an electrochemical cell comprising the above hydrogen storage material are disclosed.

Abstract: A low-pressure mercury vapor discharge lamp is provided with a light-transmitting discharge vessel, enclosing, in a gastight manner, a discharge space provided with a filling of mercury and a rare gas. The discharge vessel comprises means for maintaining a discharge in the discharge space. At least a portion of an inner wall of the discharge vessel is provided with a translucent layer which-according to the invention has a thickness in the range from 1 to 50 ?m and comprises an alkaline-earth-borate.

Abstract: A lithographic projection apparatus includes a radiation system for providing a projection beam of radiation having a wavelength ?1 smaller than 50 nm; a support structure for supporting patterning structure, the patterning structure serving to pattern the projection beam according to a desired pattern; a substrate table for holding a substrate; and a projection system for projecting the patterned beam onto a target portion of the substrate. The apparatus further includes a radiation sensor which is located so as to be able to receive radiation out of the projection beam, said sensor comprising a radiation-sensitive material which converts incident radiation of wavelength ?1 into secondary radiation; and sensing means capable of detecting said secondary radiation emerging from said layer.

Abstract: A low-pressure mercury-vapor discharge lamp is provided with a discharge vessel (10). The discharge vessel (10) encloses a discharge space (11) provided with a filling of mercury and an inert gas in a gastight manner. The discharge vessel (10) is provided with an amalgam which communicates with the discharge space (11). The discharge lamp comprises means for maintaining an electric discharge in the discharge vessel (10). The discharge lamp is characterized in that the amalgam comprises a bismuth-lead amalgam having a lead content in the range from 35≦Pb≦60 at. %, a bismuth content in the range from 40≦Bi≦65 at. %, and a mercury content in the range from 0.05≦Hg≦1 at. %. Preferably, the amalgam additionally comprises gold with a gold content in the range from 0.1≦Au≦20 at. %. Preferably, the gold content is in the range from 8≦Au≦12 at. %.

Abstract: A low-pressure mercury-vapor discharge lamp is provided with a discharge vessel (10). The discharge vessel (10) encloses a discharge space (11) provided with a filling of mercury and an inert gas in a gastight manner. The discharge vessel (10) is provided with an amalgam which communicates with the discharge space (11). The discharge lamp comprises means for maintaining an electric discharge in the discharge vessel (10). The discharge lamp is characterized in that the amalgam comprises a bismuth-lead amalgam having a lead content in the range from 35≦Pb≦60 at. %, a bismuth content in the range from 40≦Bi≦65 at. %, and a mercury content in the range from 0.05≦Hg≦1 at. %. Preferably, the amalgam additionally comprises gold with a gold content in the range from 0.1≦Au≦20 at. %. Preferably, the gold content is in the range from 8≦Au≦12 at. %.