Patents by Inventor Wilhelmus J. T. P. van de Wiel

Wilhelmus J. T. P. van de Wiel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Balanced positioning system for use in lithographic apparatus
    Patent number: 7202937
    Abstract: A balanced positioning apparatus comprises a balance mass which is supported so as to be moveable in the three degrees of freedom, such as X and Y translation and rotation about the Z-axis. Drive forces in these degrees of freedom act directly between the positioning body and the balance mass. Reaction forces arising from positioning movements result in corresponding movement of the balance mass and all reaction force are kept within the balanced positioning system. The balance mass may be a rectangular balance frame having the stators of two linear motors forming the uprights of an H-drive mounted on opposite sides. The cross-piece of the H-drive spans the frame and the positioned object is positioned within the central opening of the frame.
    Type: Grant
    Filed: February 28, 2006
    Date of Patent: April 10, 2007
    Assignee: ASML Netherlands B.V.
    Inventors: Yim Bun P. Kwan, Wilhelmus J. T. P. van de Wiel
  • Balanced positioning system for use in lithographic apparatus
    Patent number: 7034920
    Abstract: A balanced positioning apparatus comprises a balance mass which is supported so as to be moveable in the three degrees of freedom, such as X and Y translation and rotation about the Z-axis. Drive forces in these degrees of freedom act directly between the positioning body and the balance mass. Reaction forces arising from positioning movements result in corresponding movement of the balance mass and all reaction force are kept within the balanced positioning system. The balance mass may be a rectangular balance frame having the stators of two linear motors forming the uprights of an H-drive mounted on opposite sides. The cross-piece of the H-drive spans the frame and the positioned object is positioned within the central opening of the frame.
    Type: Grant
    Filed: December 19, 2002
    Date of Patent: April 25, 2006
    Assignee: ASML Netherlands B.V.
    Inventors: Yim Bun P. Kwan, Wilhelmus J. T. P. van de Wiel
  • Balanced positioning system for use in lithographic apparatus
    Patent number: 6525803
    Abstract: A balanced positioning apparatus comprises a balance mass which is supported so as to be moveable in the three degrees of freedom, such as X and Y translations and rotation about the Z-axis. Drive forces in these degrees of freedom act directly between the positioning body and the balance mass. Reaction forces arising from positioning movements result in corresponding movement of the balance mass and all reaction forces are kept within the balanced positioning system. The balance mass may be a rectangular balance frame having the stators of two linear motors forming the uprights of an H-drive mounted on opposite sides. The cross-piece of the H-drive spans the frame and the positioned object is positioned within the central opening of the frame.
    Type: Grant
    Filed: December 19, 2000
    Date of Patent: February 25, 2003
    Assignee: ASML Netherlands B.V.
    Inventors: Yim Bun P. Kwan, Wilhelmus J. T. P. van de Wiel
  • Balanced positioning system for use in lithographic apparatus
    Publication number: 20010006762
    Abstract: A balanced positioning apparatus comprises a balance mass which is supported so as to be moveable in the three degrees of freedom, such as X and Y translations and rotation about the Z-axis. Drive forces in these degrees of freedom act directly between the positioning body and the balance mass. Reaction forces arising from positioning movements result in corresponding movement of the balance mass and all reaction forces are kept within the balanced positioning system. The balance mass may be a rectangular balance frame having the stators of two linear motors forming the uprights of an H-drive mounted on opposite sides. The cross-piece of the H-drive spans the frame and the positioned object is positioned within the central opening of the frame.
    Type: Application
    Filed: December 19, 2000
    Publication date: July 5, 2001
    Inventors: Yim Bun P. Kwan, Wilhelmus J.T.P. van de Wiel