Patents by Inventor Willard F. Chandler

Willard F. Chandler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slurry containment device for polishing semiconductor wafers
    Patent number: 5299393
    Abstract: Liquid abrasive slurry for chemical-mechanical polishing of semiconductor wafers is held on a rotating polish table by a containment device having two continuous circular bonded strips of differing flexibilities. A releasable clamp seals the entire length of the more flexible strip to the table periphery.
    Type: Grant
    Filed: July 21, 1992
    Date of Patent: April 5, 1994
    Assignee: International Business Machines Corporation
    Inventors: Willard F. Chandler, LaVerne B. Jacobson, Robert D. Johnson, Steven E. Monahan
  • Method and apparatus for removing vapor from a pressurized sprayed liquid in the manufacture of semiconductor integrated circuits
    Patent number: 5279926
    Abstract: Pressurized liquid solvent is dispensed on specific areas of a semiconductor wafer. A vented accumulator removes bubbles introduced by an upstream needle valve. The accumulator outlet leads directly to a dispensing tip, without further pressure drop.
    Type: Grant
    Filed: May 6, 1992
    Date of Patent: January 18, 1994
    Assignee: International Business Machines Corporation
    Inventors: Willard F. Chandler, Robert D. Johnson, Steven E. Monahan, Ronald W. Olson