Patents by Inventor Willem Arie Van Helden

Willem Arie Van Helden has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for thermally conditioning an optical element
    Patent number: 9176398
    Abstract: A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.
    Type: Grant
    Filed: May 20, 2009
    Date of Patent: November 3, 2015
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Roger Wilhelmus Antonius Henricus Schmitz, Tjarko Adriaan Rudolf Van Empel, Marcel Johannus Elisabeth Hubertus Muitjens, Lun Cheng, Franciscus Johannes Joseph Janssen, Willem Arie Van Helden, Richard Versluis, Paulus Bartholomeus Johannes Schaareman, Axel Sebastiaan Lexmond, Evert Nieuwkoop, Charles William Barras Potts, Martinus Henricus Johannes Lemmen, Frederik Van Der Graaf, Mathilde Gertrudis Maria De Kroon, Johannes Fransiscus Maria Velthuis