Patents by Inventor Willem Arthur Vliegenthart

Willem Arthur Vliegenthart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alignment marker and lithographic apparatus and device manufacturing method using the same
    Patent number: 7781237
    Abstract: An apparatus includes a first support structure configured to support an element that has an alignment marker provided with at least one height difference. The apparatus also includes an alignment sensor comprising a light source that is configured to provide a light beam that illuminates the alignment marker; and at least one detector configured to detect the at least one height difference of the alignment marker by analyzing the light beam reflected by the alignment marker. Such an apparatus may be used to align of the element with respect to the first support structure.
    Type: Grant
    Filed: June 8, 2005
    Date of Patent: August 24, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Gert-Jan Heerens, Anastasius Jacobus Anicetus Bruinsma, Jacob Fredrik Frisco Klinkhamer, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Hubert Adriaan Van Mierlo, Willem Arthur Vliegenthart