Abstract: Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.

Abstract: Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.

Abstract: Amplifier device of the pulse width modulation amplifier type (PWM amplifier), which comprises a switch according to a micro-electromechanical system (MEMS-switch) for a signal to be amplified (Vi), wherein the MEMS switch comprises at least one substrate (1) on which are arranged—a movable thin film of an electrically conductive material,—a first electrode forming the input for the signal to be amplified (Vi),—a second electrode forming the output for a pulse width-modulated signal, and—actuator means for moving the thin film subject to the signal to be amplified (Vi), wherein the amplifier device is adapted to generate the pulse width-modulated signal (VPWM) subject to the movement of the thin film.

Abstract: An apparatus for determining the performances of at least one micromachined or microelectromechanical device (MEMS device) intended to carry a high frequency signal having an intended working frequency is disclosed. The MEMS device comprises a capacitive structure with at least one movable part, able to move with a frequency. The apparatus comprises a voltage signal source, at least one voltage divider circuit arranged between the capacitive structure and the voltage signal source, and a detection unit for detecting and measuring the voltage at the outlet of the voltage divider. The detection unit provides a combined voltage signal of an actuation voltage able to act on the moveable part of the capacitive structure with an actuation frequency and of a measurement voltage having a measurement frequency lower than the intended working frequency.

Abstract: An apparatus for determining the performances of at least one micromachined or microelectromechanical device (MEMS device) intended to carry a high frequency signal having an intended working frequency is disclosed. The MEMS device comprises a capacitive structure with at least one movable part, able to move with a frequency. The apparatus comprises a voltage signal source, at least one voltage divider circuit arranged between the capacitive structure and the voltage signal source, and a detection unit for detecting and measuring the voltage at the outlet of the voltage divider. The detection unit provides a combined voltage signal of an actuation voltage able to act on the moveable part of the capacitive structure with an actuation frequency and of a measurement voltage having a measurement frequency lower than the intended working frequency.