Patents by Inventor Willem Vliegenthart

Willem Vliegenthart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alignment marker and lithographic apparatus and device manufacturing method using the same
    Publication number: 20060007442
    Abstract: An apparatus includes a first support structure configured to support an element that has an alignment marker provided with at least one height difference. The apparatus also includes an alignment sensor comprising a light source that is configured to provide a light beam that illuminates the alignment marker; and at least one detector configured to detect the at least one height difference of the alignment marker by analyzing the light beam reflected by the alignment marker. Such an apparatus may be used to align of the element with respect to the first support structure.
    Type: Application
    Filed: June 8, 2005
    Publication date: January 12, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Gert-Jan Heerens, Anastasius Bruinsma, Jacob Klinkhamer, Bastiaan Lambertus Van De Ven, Hubert Van Mierlo, Willem Vliegenthart
  • Alignment marker and lithographic apparatus and device manufacturing method using the same
    Publication number: 20050275841
    Abstract: An apparatus includes a first support structure configured to support an element that has an alignment marker provided with at least one height difference. The apparatus also includes an alignment sensor comprising a light source that is configured to provide a light beam that illuminates the alignment marker; and at least one detector configured to detect the at least one height difference of the alignment marker by analyzing the light beam reflected by the alignment marker. Such an apparatus may be used to align of the element with respect to the first support structure.
    Type: Application
    Filed: June 9, 2004
    Publication date: December 15, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Gert-Jan Heerens, Anastasius Bruinsma, Jacob Klinkhamer, Bastiaan Lambertus Marinus Van De Ven, Hubert Van Mierlo, Willem Vliegenthart