Patents by Inventor Willem Wondergem

Willem Wondergem has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Beam exposure apparatus comprising a diaphragm drive for an object carrier
    Patent number: 4661968
    Abstract: A beam exposure apparatus is set forth comprising a mechanism for displacing an object being irradiated. This mechanism involves a drive mechanism. The drive mechanism may be rigidly connected to a wall of the apparatus, and a secondary shaft of the drive mechanism is connected by a friction coupling to a part of the object carrier which is to be positioned. The drive mechanism is driven by a direct current drive motor which is powered by a pulsed direct current. The object can be thus positioned with a step accuracy of approximately 0.2 micron. Such positioning can be measured with this accuracy be means of an inductive position detector.
    Type: Grant
    Filed: October 31, 1985
    Date of Patent: April 28, 1987
    Assignee: U.S. Philips Corporation
    Inventor: Willem Wondergem