Patents by Inventor Willi Heintel
Willi Heintel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10663873Abstract: A mirror arrangement, in particular for a microlithographic projection exposure apparatus, includes at least one mirror element bearing a mirror surface provided for reflecting electromagnetic radiation, at least one carrier element including a head section, which is provided for receiving at least one mirror element, and also a seat section. The arrangement further includes a mount arrangement, for receiving the at least one carrier element. At least one insertion opening is in the mount arrangement. The seat section of the carrier element plunges into the insertion opening. In addition, the arrangement includes a channel device for guiding a heat transfer medium is formed in the mount arrangement in the region surrounding the seat section. A method for dissipating heat is provided.Type: GrantFiled: December 29, 2016Date of Patent: May 26, 2020Assignee: Carl Zeiss SMT GmbHInventors: Willi Heintel, Hermann Bieg
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Patent number: 10133183Abstract: An optical component for a projection exposure apparatus includes a multiplicity of variably positionable beam-guiding elements which serve as pupil facets. The optical component can be arranged in the beam path of the projection optical unit.Type: GrantFiled: September 6, 2016Date of Patent: November 20, 2018Assignee: Carl Zeiss SMT GmbHInventors: Michael Patra, Markus Deguenther, Paul Buettner, Willi Heintel, Henner Baitinger
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Patent number: 9658542Abstract: The disclosure relates to an optical assembly for a projection exposure apparatus for semiconductor lithography. The optical assembly includes at least one optical element and a mounting body for mechanically fixing the element in a supporting structure. The optical assembly also includes at least one cooling body for dissipating heat from the element. The mounting body and the cooling body are separate from one another. The optical element is connected to the cooling body via at least one heat-conducting element. The disclosure also relates to a projection exposure apparatus including an optical assembly according to the disclosure.Type: GrantFiled: October 7, 2014Date of Patent: May 23, 2017Assignee: Carl Zeiss SMT GmbHInventors: Willi Heintel, Steffen Fritzsche
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Publication number: 20170108788Abstract: A mirror arrangement, in particular for a microlithographic projection exposure apparatus, includes at least one mirror element bearing a mirror surface provided for reflecting electromagnetic radiation, at least one carrier element including a head section, which is provided for receiving at least one mirror element, and also a seat section. The arrangement further includes a mount arrangement, for receiving the at least one carrier element. At least one insertion opening is in the mount arrangement. The seat section of the carrier element plunges into the insertion opening. In addition, the arrangement includes a channel device for guiding a heat transfer medium is formed in the mount arrangement in the region surrounding the seat section. A method for dissipating heat is provided.Type: ApplicationFiled: December 29, 2016Publication date: April 20, 2017Inventors: Willi Heintel, Hermann Bieg
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Publication number: 20160370707Abstract: An optical component for a projection exposure apparatus includes a multiplicity of variably positionable beam-guiding elements which serve as pupil facets. The optical component can be arranged in the beam path of the projection optical unit.Type: ApplicationFiled: September 6, 2016Publication date: December 22, 2016Inventors: Michael Patra, Markus Deguenther, Paul Buettner, Willi Heintel, Henner Baitinger
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Publication number: 20160109679Abstract: There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.Type: ApplicationFiled: September 8, 2015Publication date: April 21, 2016Inventors: Dirk Schaffer, Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner
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Patent number: 9134501Abstract: There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.Type: GrantFiled: September 14, 2007Date of Patent: September 15, 2015Assignee: Carl Zeiss SMT GmbHInventors: Dirk Schaffer, Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner
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Publication number: 20150103326Abstract: The disclosure relates to an optical assembly for a projection exposure apparatus for semiconductor lithography. The optical assembly includes at least one optical element and a mounting body for mechanically fixing the element in a supporting structure. The optical assembly also includes at least one cooling body for dissipating heat from the element. The mounting body and the cooling body are separate from one another. The optical element is connected to the cooling body via at least one heat-conducting element. The disclosure also relates to a projection exposure apparatus including an optical assembly according to the disclosure.Type: ApplicationFiled: October 7, 2014Publication date: April 16, 2015Inventors: Willi Heintel, Steffen Fritzsche
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Patent number: 8441747Abstract: There is provided an optical module for microlithography. The optical module includes an optical element and a retaining device for holding the optical element. The optical element has (a) a main extension plane, in which it defines a radial direction R and a circumferential direction U, and (b) a free optical diameter and an overrun in the region of its outer periphery. The retaining device contacts the optical element in the region of the overrun, and is formed and/or contacts the optical element in such a manner that the overrun ratio, calculated from the overrun related to a minimum overrun necessary for the production of the optical element, is at most 1.5.Type: GrantFiled: September 14, 2007Date of Patent: May 14, 2013Assignee: Carl Zeiss SMT GmbHInventors: Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner, Bernhard Geuppert, Ulrich Bingel, Tilman Schwertner
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Patent number: 8305701Abstract: The disclosure relates to a connecting arrangement for an optical device, such as in microlithography. The connecting arrangement includes a first body, a second body and a connecting device. The first body contacts the second body in a laminar manner in a contact region. The connecting device is connected to the second body and contacts the first body via at least one contact unit. The connecting device is configured to generate a predefinable contact force in the contact region between the first body and the second body. The contact unit includes a plurality of separate contact elements. Each contact element is connected to the second body via a spring unit which can be elastically deformed to generate a contribution to the contact force.Type: GrantFiled: September 17, 2009Date of Patent: November 6, 2012Assignee: Carl Zeiss SMT GmbHInventors: Heiko Methe, Willi Heintel, Sascha Licht
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Publication number: 20110063590Abstract: An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.Type: ApplicationFiled: November 22, 2010Publication date: March 17, 2011Applicant: CARL ZEISS SMT AGInventors: Thomas Bischoff, Hagen Federau, Willi Heintel, Bernd Wuesthoff, Jochen Wieland
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Patent number: 7859641Abstract: An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.Type: GrantFiled: January 17, 2008Date of Patent: December 28, 2010Assignee: Carl Zeiss SMT AGInventors: Thomas Bischoff, Hagen Federau, Willi Heintel, Bernd Wuesthoff, Jochen Wieland
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Patent number: 7760327Abstract: There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.Type: GrantFiled: March 31, 2006Date of Patent: July 20, 2010Assignee: Carl Zeiss SMT AGInventors: Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber, Bernhard Geuppert, Bernhard Gellrich, Jens Kugler, Franz Sorg, Willi Heintel, Harald Kirchner, Wolfgang Keller, Andreas Frommeyer, Fraser G. Morrison
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Publication number: 20100065252Abstract: The disclosure relates to a connecting arrangement for an optical device, such as in microlithography. The connecting arrangement includes a first body, a second body and a connecting device. The first body contacts the second body in a laminar manner in a contact region. The connecting device is connected to the second body and contacts the first body via at least one contact unit. The connecting device is configured to generate a predefinable contact force in the contact region between the first body and the second body. The contact unit includes a plurality of separate contact elements.Type: ApplicationFiled: September 17, 2009Publication date: March 18, 2010Applicant: CARL ZEISS SMT AGInventors: Heiko Methe, Willi Heintel, Sascha Licht
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Publication number: 20090147229Abstract: There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.Type: ApplicationFiled: September 14, 2007Publication date: June 11, 2009Applicant: CARL ZEISS SMT AGInventors: Dirk Schaffer, Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner
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Patent number: 7448763Abstract: An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).Type: GrantFiled: December 3, 2003Date of Patent: November 11, 2008Assignee: Carl Zeiss SMT AGInventors: Andreas Frommeyer, G Fraser Morrison, Wolfgang Keller, Yim-Bun Patrick Kwan, Harald Kirchner, Willi Heintel
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Publication number: 20080239270Abstract: An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.Type: ApplicationFiled: January 17, 2008Publication date: October 2, 2008Applicant: CARL ZEISS SMT AGInventors: Thomas Bischoff, Hagen Federau, Willi Heintel, Bernd Wuesthoff, Jochen Wieland
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Publication number: 20080204689Abstract: There is provided an optical module for microlithography. The optical module includes an optical element and a retaining device for holding the optical element. The optical element has (a) a main extension plane, in which it defines a radial direction R and a circumferential direction U, and (b) a free optical diameter and an overrun in the region of its outer periphery. The retaining device contacts the optical element in the region of the overrun, and is formed and/or contacts the optical element in such a manner that the overrun ratio, calculated from the overrun related to a minimum overrun necessary for the production of the optical element, is at most 1.5.Type: ApplicationFiled: September 14, 2007Publication date: August 28, 2008Applicant: Carl Zeiss SMT AGInventors: Willi Heintel, Bernhard Geuppert, Ulrich Bingel, Joachim Hartjes, Hagen Federau, Harald Kirchner, Tilman Schwertner
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Publication number: 20070014037Abstract: An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).Type: ApplicationFiled: December 3, 2003Publication date: January 18, 2007Inventors: Andreas Frommeyer, G. Morrison, Wolfgang Keller, Yim-Bun Kwan, Harald Kirchner, Willi Heintel
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Publication number: 20060262704Abstract: There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.Type: ApplicationFiled: March 31, 2006Publication date: November 23, 2006Inventors: Hans-Jurgen Scherle, Yim-Bun Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber, Bernhard Geuppert, Bernhard Gellrich, Jens Kugler, Franz Sorg, Willi Heintel, Harald Kirchner, Wolfgang Keller, Andreas Frommeyer, Fraser Morrison