Patents by Inventor Willi Ulrich

Willi Ulrich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7149030
    Abstract: A diffractive optical element has a plurality of diffraction structures for a certain wavelength. These each have a width measured in the plane of the diffractive optical element and a height measured perpendicularly thereto. The widths and the heights of the diffraction structures vary over the area of the diffractive optical element. An optical arrangement comprising such a diffractive optical element has, in addition, a neutral filter. The efficiency of such a diffractive optical element and of such an arrangement can be optimized locally for usable light.
    Type: Grant
    Filed: November 11, 2004
    Date of Patent: December 12, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: Bernd Kleemann, Hans-Jurgen Rostalski, Willi Ulrich
  • Publication number: 20050073746
    Abstract: A diffractive optical element has a plurality of diffraction structures for a certain wavelength. These each have a width measured in the plane of the diffractive optical element and a height measured perpendicularly thereto. The widths and the heights of the diffraction structures vary over the area of the diffractive optical element. An optical arrangement comprising such a diffractive optical element has, in addition, a neutral filter. The efficiency of such a diffractive optical element and of such an arrangement can be optimized locally for usable light.
    Type: Application
    Filed: November 11, 2004
    Publication date: April 7, 2005
    Applicant: CARL ZEISS SMT AG
    Inventors: Bernd Kleemann, Hans-Jurgen Rostalski, Willi Ulrich
  • Publication number: 20040190142
    Abstract: A diffractive optical element has a plurality of diffraction structures for a certain wavelength. These each have a width measured in the plane of the diffractive optical element and a height measured perpendicularly thereto. The widths and the heights of the diffraction structures vary over the area of the diffractive optical element. An optical arrangement comprising such a diffractive optical element has, in addition, a neutral filter. The efficiency of such a diffractive optical element and of such an arrangement can be optimized locally for usable light.
    Type: Application
    Filed: April 6, 2004
    Publication date: September 30, 2004
    Inventors: Bernd Kleemann, Hans-Jurgen Rostalski, Willi Ulrich
  • Patent number: 6728036
    Abstract: A diffractive optical element has a plurality of diffraction structures for a certain wavelength. These each have a width measured in the plane of the diffractive optical element and a height measured perpendicularly thereto. The widths and the heights of the diffraction structures vary over the area of the diffractive optical element. An optical arrangement comprising such a diffractive optical element has, in addition, a neutral filter. The efficiency of such a diffractive optical element and of such an arrangement can be optimized locally for usable light.
    Type: Grant
    Filed: May 10, 2002
    Date of Patent: April 27, 2004
    Assignee: Carl Zeiss Semiconductor Manufacturing Technologies AG
    Inventors: Bernd Kleemann, Hans-J├╝rgen Rostalski, Willi Ulrich
  • Publication number: 20020196547
    Abstract: A diffractive optical element has a plurality of diffraction structures for a certain wavelength. These each have a width measured in the plane of the diffractive optical element and a height measured perpendicularly thereto. The widths and the heights of the diffraction structures vary over the area of the diffractive optical element. An optical arrangement comprising such a diffractive optical element has, in addition, a neutral filter. The efficiency of such a diffractive optical element and of such an arrangement can be optimized locally for usable light.
    Type: Application
    Filed: May 10, 2002
    Publication date: December 26, 2002
    Inventors: Bernd Kleemann, Hans-Jurgen Rostalski, Willi Ulrich
  • Patent number: 6424471
    Abstract: A catadioptric projection objective comprises an object plane, a physical beam splitter, a concave mirror, an image plane, a first objective part, a second objective part, and a third objective part. The first objective part is located between the object plane and the physical beam splitter. The second objective part is located between the physical beam splitter and the concave mirror, and includes at least two divergent lenses. The third objective part is located between the physical beam splitter and the image plane.
    Type: Grant
    Filed: November 10, 2000
    Date of Patent: July 23, 2002
    Assignee: Carl-Zeiss-Stiftung
    Inventors: Willi Ulrich, Helmut Beierl
  • Patent number: 5475197
    Abstract: For defined ablation of a surface, successive partial regions of equal surface area are acted on by a radiation source, preferably a laser, through an optical system. The partial regions are smaller as regards surface area than the whole surface to be processed, so that the respective radiation source can be dimensioned in a less costly manner. Telescope optics with conical surfaces serve as optical systems suitable for this purpose.
    Type: Grant
    Filed: June 14, 1993
    Date of Patent: December 12, 1995
    Assignee: Carl-Zeiss-Stiftung
    Inventors: Walter Wrobel, Theo Lasser, Peter Reimer, Herbert Gross, Willi Ulrich