Abstract: A rotor affixed to a central mounting post by helical springs for oscillatory rotary movement about the post. The post defining a Z axis and the sensing capacitors adjacent the rotor defining X and Y axes. The rotor, helical springs and post being formed of polysilicon in a single emiconductor process step.

Abstract: An environmental sensor integrated with high current drive device is provided. An environmental sensor is fabricated on a semiconductor substrate using conventional MOS process used for N-well CMOS logic and DMOS power transistors. An N-well is preferably used as a junction etch stop for micromachining of mechanical sensor components. A high voltage P-type region is used to electrically isolate the high current device from the sensor device. By locating the sensor device away from the high current drive device on a common semiconductor substrate, good performance can be achieved from the sensor even while the high current device dissipates a large amount of power.

Abstract: A three axis accelerometer includes a semiconductor substrate with a plurality of layers of conductive material formed thereon by semiconductor manufacturing techniques, with each layer defining a plane and mounted in parallel spaced relation to each other. A first of the layers is fixedly mounted and a second layer is mounted for limited movement relative to the first layer with the first and second layers forming a first capacitance varying in accordance with acceleration of the accelerometer along a first axis defined by the first and second layers. A plurality of first surfaces and a plurality of electrically isolated plates are formed as a portion of the first and the second layers, respectively, and positioned in parallel juxtaposition, with the plates being moveable relative to the first layer.

Abstract: A rotor affixed to a central mounting post by helical springs for oscillatory rotary movement about the post. The post defining a Z axis and the sensing capacitors adjacent the rotor defining X and Y axes.

Abstract: A vibration gyroscope with a mass mounted for vibrational movement on a central post. Sensing capacitors are mounted adjacent the mass for sensing vibrational movement in two perpendicular axes. The mass includes a pair of elements mounted between the parallel arms of an H shaped frame and powered for equal and opposite vibrations so that no movement is imparted to the frame except that caused by forces induced by rotational movement.

Abstract: A vibration gyroscope including a central mounting post and a planar mass symmetrically affixed thereto for vibrational movement. The post and mass are formed from a single layer of semiconductor material deposited on a substrate, such as silicon. Capacitive plates positioned below and above the mass, formed by depositing two additional layers of semiconductor material, are utilized for driving the mass and sensing vibration produced by the Coriolis effect.

Abstract: A multi-axes gyroscope, a single axis gyroscope and a three axis accelerometer are formed on a single semiconductor substrate, along with and MPU. The gyroscopes provide sensing for rotation about three mutually orthogonal axes and the accelerometer provides sensing of acceleration along the three axes. The MPU controls and drives the gyroscopes and accelerometer and provides a continuous indication of position.

Abstract: A microprocessor having a monolithically integrated environmental sensor is provided. The microprocessor is shielded from an environmental signal by isolation which is specific to the type of sensor used, thereby allowing the sensor to be exposed to the environmental signal. Optionally, high current drive circuitry is integrated with the microprocessor-sensor circuit to provide a monolithic device which allows control of power loads based in part on output from an environmental sensing device.

Abstract: A structure is provided to integrate bulk structure resonators into a monolithic integrated circuit chip. The chip also contains the remaining circuit components (17, 21, 24) required for the desired system function. Micromachining techniques are used to fabricate both support and a cavity (11, 27, 28) which allows mechanical vibration without interference. Alternative embodiments incorporate the use of non-piezoelectric mechanical resonators (14), quartz crystal resonators (18) and thin film piezoelectric resonators (22). Each type of resonator is used for the range of frequencies to which it is suited, providing a family of monolithic resonators capable of being used with integrated circuits having operating frequencies from a few hundred hertz to over 500 Mhz.

Abstract: An accelerometer in which the seismic mass is formed in the shape of an annulus. The annular shape allows twisting motions as well as displacement of the seismic mass to be sensed and restoring electrostatic forces applied. This allows the supporting spring to be made extremely weak avoiding the mechanical limitations of springs.

Abstract: A method of joining an integrated circuit die (10) and a sensor die (11) by the use of solder bumps (12) for the formation of a hybrid circuit assembly. Sensor die (11) and integrated circuit die (10) are manufactured separately from each other. These two components are then joined by at least one solder bump to make a hybrid circuit assembly. A dielectric sealant (21) is deposited around the outside edges of sensor (11) to prevent foreign material such as encapsulating material from interfering in the operation of the sensor. The hybrid circuit assembly is encapsulated in a plastic material (14).

Abstract: A differential capacitor structure includes a first static conductive layer and a second static conductive layer not electrically coupled to the first static conductive layer. A dynamic conductive layer is suspended between the first and second static conductive layers.

Abstract: A monolithic diffraction spectrometer having a diffraction grating formed over a light sensing array is provided. The diffraction grating serves to diffract wavelengths of interest to an underlying photosensitive device while diffracting other wavelengths away from the photosensing element. By forming a diffraction grating with a variable pitch, or multiple diffraction gratings having various pitches, any number of specific light wavelengths can be detected with a high degree of precision. When a diffraction grating having a pitch which is in the order of the incident wavelength of light is used, improved sensitivity is achieved.

Abstract: A lamp intensity control system combines the functions of the tail light, the brake light, and the turn indicator light signals into one signal for controlling a plurality of lamps in an automobile. The tail light, brake light and turn indicator light signals are combined into one signal and modulated wherein the percent of modulation determines the intensity of the brightness of the plurality of lamps. Temperature protection is provided wherein a temperature limit circuit monitors the temperature of a SENSFET and disables the SENSFET if its temperature exceeds a predetermined magnitude. Over-current and open lamp conditions are monitored by comparator circuits. An over-current condition causes the SENSFET to be disabled. An over-temperature, over-current or open-lamp condition is signaled by a fault output signal.

Abstract: An integrated circuit having both logic transistors and at least one power switching transistor formed on the same substrate is described, wherein both sets of transistors are powered by current received from the substrate, the power transistor being powered by current flowing directly from the substrate, and the logic transistors being powered by current flowing through a metal layer making electrical contact to the substrate.

Abstract: A voltage level conversion circuit manufacturable in a standard semiconductor process is provided wherein an output voltage having a magnitude greater than the supply voltage and greater than the gate oxide breakdown voltage of the MOS devices is produced. A voltage level shifter circuit alternately charges a pair of capacitors which in turn alternately charges a second pair of capacitors. The second pair of capacitors is coupled to the output to produce the shifted output voltage having a frequency that is double the frequency of the input to the voltage level shifter circuit.

Abstract: A reverse battery and loss of positive supply voltage detector circuit includes a power field effect transistor for switching a stored inductive energy to the ground supply voltage terminal if there is a disruption in the power supply. A detector circuit senses a reversal of the supply voltage connections as would happen if the battery were connected backwards and enables the power field effect transistor for discharging a negative voltage that may have developed across an inductive load. The detector circuit further senses a loss of the positive supply voltage and enables the power field effect transistor for discharging a negative voltage that may have developed across an inductive load due to the disruption of applied power.

Abstract: A power field effect transistor driver circuit manufacturable in a MOS process is provided wherein a power field effect transistor provides high current drive capability for driving fractional horsepower DC motors or other inductive loads. The power field effect transistor driver circuit provides reliable operation under environmentally harsh conditions such as overvoltage transients at the supply voltage terminals, loss of ground supply terminal connection, and short circuits at the load terminal.

Abstract: A TTL compatible CMOS input circuit comprising a series of current mirror circuits arranged so that the input transistor is used to discharge the capacitive load and one of a pair of transistors in one of the current mirror circuits provides charging current for the load. Only one of the charging and discharging transistor switches in "on" at any one time, thus reducing circuit power consumption and reducing required device sizes. The input switching level is also independent of the supply voltage.

Abstract: An MOS device is usually connected to a power supply through an MOS device which is connected so that load current can be supplied to the MOS circuit when it is turned on and leakage current can be supplied thereto when it is turned off. It has been found that the recovery time of such an arrangement upon turn off is substantially longer than the turn on time. This invention provides a method and means for minimizing the recovery time.