Abstract: Exemplary aspects of the present invention are directed to a sensor that uses the spectral sensitivity of detectors, the spectral properties of optical filters, and mathematical addition and or subtraction to isolate the desired spectral band. The sensor includes a downconverter member for converting the high energy beam to easily detectable visible or NIR light, and optical filter elements and relay optics for directing the visible light to the sensing members. The sensing members transmit an electronic signal proportional to the power of the light in the passband to amplifiers wherein multiple sensing members convey optical power of selected wavelength bands through an amplifier to a microprocessor with an algorithm to determine the power in the desired band of interest and then to a displaying member. The system may be used in a vacuum, in ambient non-vacuum conditions or a purged environment.

Abstract: Exemplary aspects of the present invention are directed to an imaging sensor system for beams in the 1-200 nm spectral regions. The system may include a downconverter for converting the beam to visible light, optical filter elements, and relay optics for directing the visible light to the imaging detector. The relay optics convey the image and/or optical beam profile intensity to a 2-D imaging array such as CMOS, CCD (or other imaging detector device). The system can be used in a vacuum or in ambient non-vacuum conditions which may include a purged environment.

Abstract: The fluorescent response of a UV radiometer to a UV beam is normalized over an entrance aperture area by using a plurality, preferably two, converting plates. The fluorescent response of at least two and preferably a plurality of crystal converting plates is ascertained. Crystal converting plates having complementary responses are selected and placed adjacently in the entrance aperture area such that an incident UV beam will cause a net complementary fluorescent response from the combined first and second crystal converting plates that is less varying over the entrance aperture area than the respective fluorescent responses of the individual first and second crystal converting plates.

Abstract: An imaging apparatus for DUV beams is provided which includes a lens for receiving a DUV beam and producing an image of the DUV beam, wherein the lens has an aplanatic surface and a hemispheric surface, and wherein at least the aplanatic surface is made from or otherwise has a down-converting medium for producing a down-converted beam; an image sensing member for viewing an image of the down-converted beam; and optics for relaying the image of the down-converted beam from the lens to the image sensing member. A processor can be communicated with the image sensing member for analyzing the image of the DUV beam.

Abstract: A position sensor for ultraviolet beams includes a beam positioning member for directing an ultraviolet beam along a path; a downconverter member for converting the beam to visible light; a position sensing member for sensing position of visible light thereon; and relay optics for directing the visible light to the position sensing member; wherein the position sensing member is communicated with the beam positioning member for conveying information regarding position of the visible light to the beam positioning member.

Abstract: A position sensor for ultraviolet beams includes a beam positioning member for directing an ultraviolet beam along a path; a downconverter member for converting the beam to visible light; a position sensing member for sensing position of visible light thereon; and relay optics for directing the visible light to the position sensing member; wherein the position sensing member is communicated with the beam positioning member for conveying information regarding position of the visible light to the beam positioning member.

Abstract: A device for scanning a linear section of a UV beam to determine the local intensity thereof along the linear section. The UV beam impinges upon flourescent material and the fluorescent emission distribution is meausred to indicate the UV beam intensity.

Abstract: An ultraviolet radiometer converts UV radiation to fluorescent radiation. An optical signal corresponding to the intensity of detected fluorescent radiation is converted to an electrical signal corresponding to the power or energy of the detected fluorescent emission. A monitoring element receives the electrical signal and monitors the power or energy of the UV radiation.

Abstract: A laser detection system is disclosed. Optical means projects light scattered from a moving localized portion of the beam onto a photosensitive strip. Voltage applied across the strip causes the light generated electrons therein to move through the strip at the same rate as the scattered light from the moving localized portion of the beam projected onto the strip moves across the strip so that all the electrons generated in the strip are detected as an accumulated charge at one end thereof.

Abstract: A laser comprising a plurality of laser discs disposed normal to the laser beam propagation path within a cavity and including prisms between the laser discs to redirect the pump light onto the faces of the laser discs.