Patents by Inventor William C. Lester

William C. Lester has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Two-sided bias sputter deposition method and apparatus
    Patent number: 4183797
    Abstract: Method and apparatus for coating a thin film upon a substrate in a vacuum chamber using the sputter deposition technique on both sides of the substrate without rotation of the substrate. The substrate is held between two movable rams and is located between two targets equal to or larger in size than the substrate. The rams supply power and cooling to the substrate. A glow suppression ring circumscribes the periphery of the substrate. The cathodes of the sputtering system can be magnetically enhanced for concentration of the sputtering plasma.
    Type: Grant
    Filed: December 22, 1978
    Date of Patent: January 15, 1980
    Assignee: International Business Machines Corporation
    Inventors: Thomas N. Kennedy, William C. Lester, George W. McDonough, John D. Michaelsen