Patents by Inventor William Charles Smith, Jr.

William Charles Smith, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Programmable method for cleaning semiconductor elements
    Patent number: 5863348
    Abstract: Method and apparatus for cleaning a workpiece such as a semiconductor element in which the element is placed on a chuck mounted on a rotation mechanism in which the rotation mechanism rotates around a first axis, and the element to be cleaned rotates around a second axis spaced from the first axis in a planetary manner. The cleaning process is programmed such that the element may be sprayed, immersed for a soak or pre-soak step, immersed while spinning, sprayed while spinning, and dried by heated gas, or any combination of these. The cleaning program is performed in a single chamber, which may be heated to a desired temperature.
    Type: Grant
    Filed: December 22, 1993
    Date of Patent: January 26, 1999
    Assignee: International Business Machines Corporation
    Inventors: William Charles Smith, Jr., Donn Allan Lord
  • Programmable method and apparatus for cleaning semiconductor elements
    Patent number: 5715610
    Abstract: Method and apparatus for cleaning a workpiece such as a semiconductor element in which the element is placed on a chuck mounted on a rotation mechanism in which the rotation mechanism rotates around a first axis, and the element to be cleaned rotates around a second axis spaced from the first axis in a planetary manner. The cleaning process is programmed such that the element may be sprayed, immersed for a soak or pre-soak step, immersed while spinning, sprayed while spinning, and dried by heated gas, or any combination of these. The cleaning program is performed in a single chamber, which may be heated to a desired temperature.
    Type: Grant
    Filed: April 27, 1995
    Date of Patent: February 10, 1998
    Assignee: International Business Machines Corporation
    Inventors: William Charles Smith, Jr., Donn Allan Lord
  • Programmable apparatus for cleaning semiconductor elements
    Patent number: 5666985
    Abstract: Method and apparatus for cleaning a workpiece such as a semiconductor element in which the element is placed on a chuck mounted on a rotation mechanism in which the rotation mechanism rotates around a first axis, and the element to be cleaned rotates around a second axis spaced from the first axis in a planetary manner. The cleaning process is programmed such that the element may be sprayed, immersed for a soak or pre-soak step, immersed while spinning, sprayed while spinning, and dried by heated gas, or any combination of these. The cleaning program is performed in a single chamber, which may be heated to a desired temperature.
    Type: Grant
    Filed: April 27, 1995
    Date of Patent: September 16, 1997
    Assignee: International Business Machines Corporation
    Inventors: William Charles Smith, Jr., Donn Allan Lord