Abstract: A specular interferometric modulator array is configured to be at least partially selectably reflective. As such, the array forms a mirror surface having the capability of displaying information to the user while simultaneously being used as a specular mirror. The displayed information may be based on information from an external source, may be programmable, and may be based on user input.

Abstract: A display element, such as an interferometric modulator, comprises a transparent conductor configured as a first electrode and a movable mirror configured as a second electrode. Advantageously, the partial reflector is positioned between the transparent conductor and the movable mirror. Because the transparent conductor serves as an electrode, the partial reflector does not need to be conductive. Accordingly, a greater range of materials may be used for the partial reflector. In addition, a transparent insulative material, such as a dielectric, may be positioned between the transparent conductor and the partial reflector in order to decrease a capacitance of the display element without changing a gap distance between the partial reflector and the movable mirror. Thus, a capacitance of the display element may be reduced without changing the optical characteristics of the display element.

Abstract: Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide information regarding properties of the MEMS device and components or sub-components in the device. This information can be used to identify errors in processing or to optimize the MEMS device. In some embodiments, analysis of the process control monitors may utilize optical measurements.

Abstract: A method and device for manipulating color in a display is disclosed. In one embodiment, a display comprises interferometric display elements formed to have spectral responses that produce white light. In one embodiment, the produced white light is characterized by a standardized white point.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: By selectively placing color filters with different transmittance spectrums on an array of modulator elements each having the same reflectance spectrum, a resultant reflectance spectrum for each modulator element and it's respective color filter is created. In one embodiment, the modulator elements in an array are manufactured by the same process so that each modulator element has a reflectance spectrum that includes multiple reflectivity lines. Color filters corresponding to multiple colors, such as red, green, and blue, for example, may be selectively associated with these modulator elements in order to filter out a desired wavelength range for each modulator element and provide a multiple color array. Because the modulator elements are manufactured by the same process, each of the modulator elements is substantially the same and common voltage levels may be used to activate and deactivate selected modulation.

Abstract: Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.

Abstract: A method and device for manipulating color in a display includes a display in which one or more of the pixels includes one or more display elements, such as interferometric modulators, configured to output colored light and one or more display elements configured to output white light. Other embodiments include methods of making such displays. In addition, embodiments include color displays configured to provide a greater proportion of the intensity of output light in green portions of the visible spectrum in order to increase perceived brightness of the display.

Abstract: In various embodiments of the invention, an anti-stiction coating is formed on at least one surface of an interior cavity of a MEMS device. Particular embodiments provide an anti-stiction on one or mirror surfaces of an interferometric light modulation device, also known as an iMoD in some embodiments. In other embodiments, an interferometric light modulation device is encapsulated within a package and the anti-stiction coating is applied after the package is fabricated. In one embodiment, one or more orifices are defined in the package, e.g., in a seal, a substrate or a backplate and the anti-stiction coating material is supplied into the interior of the package via the orifice(s). In one embodiment, the anti-stiction coating material includes a self-aligned (or self-assembled) monolayer. In yet another embodiment, the anti-stiction layer coating can be incorporated into a release process where a sacrificial layer of an interferometric light modulation device is etched away with the use of a gas.

Abstract: Methods for making MEMS devices such as interferometric modulators involve selectively removing a sacrificial portion of a material to form an internal cavity, leaving behind a remaining portion of the material to form a post structure. The material may be blanket deposited and selectively altered to define sacrificial portions that are selectively removable relative to the remaining portions. Alternatively, a material layer can be laterally recessed away from openings in a covering layer. These methods may be used to make unreleased and released interferometric modulators.

Abstract: In various embodiments of the invention, an interferometric display device is provided having an external film with a plurality of structures that redirect light from an inactive area of the display to an active area of the display. Light incident on the external film that would normally continue towards an inactive area of the display is either reflected, refracted, or scattered towards an active area of the display comprising moveable and static reflective surfaces that form an optical cavity.

Abstract: Methods and systems for packaging MEMS devices such as interferometric modulator arrays are disclosed. One embodiment of a MEMS device package structure includes a seal with a chemically reactant getter. Another embodiment of a MEMS device package comprises a primary seal with a getter, and a secondary seal proximate an outer periphery of the primary seal. Yet another embodiment of a MEMS device package comprises a getter positioned inside the MEMS device package and proximate an inner periphery of the package seal.

Abstract: In various embodiments of the invention, an interferometric display device is provided having an external film with a plurality of structures that reduce the field-of-view of the display. These structures may comprise, for example, baffles or non-imaging optical elements such as compound parabolic collectors. The baffles may comprise a plurality of vertically aligned surfaces arranged, e.g., in a grid. In certain preferred embodiments these baffles are opaque or reflective. These vertical surfaces, therefore, can substantially block light from exiting the interferometric display device in a substantially non-perpendicular direction. These vertical surfaces may, however, permit light directed in a substantially vertical direction to exit the display. The non-imaging optical elements, e.g., compound parabolic collectors, redirect light from large incident angles into more normal angles towards the display. As a result, the light reflected by the display to the user is also at a more normal angle.

Abstract: A MEMS device package comprises a substrate with a MEMS device formed thereon, a backplane, a seal, and an inactive desiccant within the package. The desiccant is activated after assembly of the package by exposure to an environmental change or an activating substance. A method of packaging a MEMS device comprises activating a desiccant and contacting a substrate with the MEMS device formed thereon, a seal, and a backplane, wherein the desiccant is disposed on the substrate or the backplane.

Abstract: This invention generally relates to methods and systems that interferometric modulators, and in particular, for providing three-dimentional displays. One embodiment comprises a system for displaying to a user a stereoscopic image comprising pixels formed on a single substrate, wherein each pixel comprises at least a first interferometric modulator, and wherein the system is configured to display a first image to a first eye of the user and to display a second image to a second eye of the user. Directional display of the two portions of the stereoscopic image is implemented by fashioning two sets of interferometric modulators, one set inclined at a first angle with respect to the substrate, and the second set inclined at a second angle with respect to the substrate.

Abstract: Various systems and methods of lighting a display are disclosed. In one embodiment, for example, a method includes applying a voltage waveform to the interferometric modulators, applying a voltage pulse to the interferometric modulators, detecting reflectivity of light from the interferometric modulators, and determining one or more quality parameters of the interferometric modulators based on the detecting reflectivity of light, where the applied voltage pulse causes the interferometric modulators to vary between an actuated and a non-actuated state, or an non-actuated state and an actuated state.

Abstract: Physical forces sufficient to deform an electronic device and/or packaging for the electronic device can damage the device. Some mechanical components in a device, for example, in a microelectromechanical device and/or in an interferometric modulator are particularly susceptible to damage. Accordingly, provided herein is a packaging system and packaged electronic device that resists physical damage, a method for manufacturing the same, and a method for protecting an electronic device from physical damage. The packaging system for the electronic device includes one or more spacers that prevent or reduce damage to the electronic device arising from contact with the packaging. In some embodiments, the packaged electronic device comprising spacers is thinner than a comparable device manufactured without spacers.

Abstract: Disclosed herein are methods and apparatus for testing interferometric modulators. The interferometric modulators may be tested by applying a time-varying voltage stimulus and measuring the resulting reflectivity from the modulators.

Abstract: Disclosed is an electronic device utilizing interferometric modulation and a package of the device. The packaged device includes a substrate, an interferometric modulation display array formed on the substrate, and a back-plate. The back-plate is placed over the display array with a gap between the back-plate and the display array. The depth of the gap may vary across the back-plate. The back-plate can be curved or have a recess on its interior surface facing the display array. Thickness of the back-plate may vary. The device may include reinforcing structures which are integrated with the back-plate.

Abstract: Optical filter functionality is incorporated into a substrate of a display element thereby decreasing the need for a separate thin film filter and, accordingly, reducing a total thickness of a filtered display element. Filter functionality may be provided by any filter material, such as pigment materials, photoluminescent materials, and opaque material, for example. The filter material may be incorporated in the substrate at the time of creating the substrate or may be selectively diffused in the substrate through a process of masking the substrate, exposing the substrate to the filter material, and heating the substrate in order to diffuse the filter material in the substrate.