Abstract: Water based polishing slurries, comprising oxide polishing particles. The polishing slurries comprise an innovative (multi-modal) particle distribution for improved polishing performance.

Abstract: A fixed abrasive, chemical-mechanical polishing system which is particularly well suited for use in the manufacture of semiconductor devices, memory disks or the like.

Abstract: An innovative method of manufacturing polishing pads using photocuring polymers and photolithography. The photolithography enables the creation of useful surface patterns not possible with conventional machining techniques and enables the use of pad materials otherwise too soft to pattern by conventional machining techniques.

Abstract: An apparatus and method for polishing the surface of a semiconductor wafer is provided in which the polishing pad has on its surface a multiplicity of nanoasperities which contact the wafer surface in combination with a reactive liquid solution free from particulate matter.

Abstract: A chemical-mechanical polishing system which is particularly well suited for use in the manufacture of semiconductor devices or the like. The invention is directed to a self-dressing, hydrophilic polishing pad capable of releasing particles during polishing. Such a pad design is very efficient in providing polishing particles over the entire polishing surface interface. Since the polishing pad produces polishing particles, the polishing fluid can comprise very low loadings of polishing particles, if any.

Abstract: An apparatus and method for polishing the surface of a semiconductor wafer is provided in which the polishing pad has on its surface a multiplicity of nanoasperities which contact the wafer surface in combination with a reactive liquid solution essentially free from particulate matter.

Abstract: The present invention relates to an article of manufacture or polishing pad for altering a surface of a workpiece, such as polishing or planarizing a semiconductor device. The article includes a polymeric matrix impregnated with a plurality of polymeric microelements, each polymeric microelement having a void space therein. The article has a work surface and a subsurface proximate to the work surface. When the article is in contact with a working environment, polymeric microelements at the work surface of the article are less rigid than polymeric elements embedded in the subsurface. As the work surface of the article is abraded during use, the work surface of the pad may be continuously regenerated. In alternative preferred embodiments, the work surface may further include a minitexture and/or a macrotexture. Preferably, the minitexture is formed by fractal patterning at least a portion of the work surface.

Abstract: The present invention relates to an article of manufacture or polishing pad for altering a surface of a workpiece, such as polishing or planarizing a semiconductor device. The article includes a polymeric matrix impregnated with a plurality of polymeric microelements, each polymeric microelement having a void space therein. The article has a work surface and a subsurface proximate to the work surface. When the article is in contact with a working environment, polymeric microelements at the work surface of the article are less rigid than polymeric elements embedded in the subsurface. As the work surface of the article is abraded during use, the work surface of the pad may be continuously regenerated. In alternative preferred embodiments, the work surface may further include a minitexture and/or a macrotexture. Preferably, the minitexture is formed by fractal patterning at least a portion of the work surface.

Abstract: A poromeric material for maintaining an electrostatic charge is provided, the material including a matrix of fibers, a polymeric binder for binding the matrix, and electrets present substantially uniformly throughout the poromeric material. Also provided are methods for making the poromeric material. In one embodiment, a polymeric binder mixture having electrets substantially uniformly contained therein is formed. The matrix of fibers is impregnated with the mixture and cured, whereby the electrets are substantially uniformly distributed throughout the matrix to produce the electrostatic poromeric material. In an alternative embodiment, the electrets are contained in the fibers of the matrix. The poromeric material may be used to encase a core to form a roller, for example, a hickey-removing roller.

Abstract: An apparatus for and method of determining and displaying important information pertaining to the use of breathable bottled gas in a pressurized fixed volume container. The apparatus determines and displays information such as consumption rate, gas requirement for future activity, gas time remaining under present and future conditions, as well as other information about the environment in a form that clearly shows critical parameters in an easily understood and intuitive Pictorial Display. The apparatus comprises transducers for measuring ambient pressures and the pressures of the bottled gas, processors or microprocessors for interpreting and analyzing the data and making the necessary computations, and a display screen for presenting information to the user.

Abstract: A portable, battery powered apparatus is provided for determining and displaying the amount of time that a fixed supply of breathable gas can sustain a consumer who wishes to breathe the gas at one or more ambient pressures. The apparatus include a device for measuring the ambient pressure in the vicinity of the consumer at least once every ten second and for generating signals representative of the ambient pressure. A device is provided for measuring the pressure of the supply gas and for generating signals representative of the supply gas pressure. The apparatus preferably includes a programmed microprocessor which periodically receives a series of supply gas pressure measurement signals and periodically determines from the series of supply gas pressure measurement signals the average rate at which the supply gas was consumed (Consumption Rate) over a time at least five times as long as the average time between the supply gas pressure measurements.

Abstract: An improved polishing pad material is produced by modifying conventional poromeric materials in which a porous thermoplastic resin matrix, typically polyurethane, is reinforced with a fibrous network such as a felted mat of polyester fibers. The polishing material is modified by coalescing the resin among the fibers, preferably by heat treatment, to increase the porosity and hardness of the material as well increasing the surface activity of the resin. The polishing material may also incorporate polishing aids such as particulate abrasives and may also be used as a lapping or grinding material.

Abstract: An apparatus for and method of determining and displaying important information pertaining to the use of breathable bottled gas in a pressurized fixed volume container. The apparatus determines and displays information such as consumption rate, gas requirement for future activity, gas time remaining under present and future conditions, as well as other information about the environment in a form that clearly shows critical parameters in an easily understood and intuitive Pictorial Display. The apparatus comprises transducers for measuring ambient pressures and the pressures of the bottled gas, processors or microprocessors for interpreting and analyzing the data and making the necessary computations, and a display screen for presenting information to the user.

Abstract: An apparatus for and method of determining and displaying important information pertaining to the use of breathable bottled gas in a pressurized fixed volume container. The apparatus determines and displays information such as consumption rate, gas requirement for future activity, gas time remaining under present and future conditions, as well as other information about the environment in a form that clearly shows critical parameters in an easily understood and intuitive Pictorial Display. The apparatus comprises transducers for measuring ambient pressures and the pressures of the bottled gas, processors or microprocessors for interpreting and analyzing the data and making the necessary computations, and a display screen for presenting information to the user.

Abstract: The workholder includes a carrier to which a flat perforated template is removably secured. An insert is removably mounted in each hole and removably supports a silicon wafer to facilitate polishing the wafer.

Abstract: A printing roller and cover therefor and a novel method for their manufacture are provided. A thin tube of heat shrinkable polymeric material is bonded to a metal or a rubber covered metal core. The thin tube is coated on its inner surface with a thermoplastic adhesive and the solvents in the adhesive are evaporated to produce a tack-free adhesive coating. The core is placed within the tube and the tube is heat shrunk around the core at a temperature sufficient to melt the adhesive, thus bonding the tube to the core. Preferably, the core is primed with an adhesive which will cross-link with the adhesive applied to the tube. The thermoplastic tube covering the core is preferably a long-lasting polymer substantially inert to chemical attack, such as a fluorinated hydrocarbon or polyolefin.