Patents by Inventor William E. Corbin, Jr.

William E. Corbin, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100051501
    Abstract: A wafer carrying structure is provided that allows more efficient operation of the opening and closing mechanisms. More specifically, the wafer carrier includes pressure relief structures that provide appropriate pressure equalization during the opening and closing operations of the wafer carrier. This allows doors on the wafer to be more easily opened and closed while also providing significant environmental isolation for the wafers during transport operations. Relief structures specifically designed to remain closed except for those brief periods of time where pressure relief is necessary to equalize pressure during opening and closing of the carrier.
    Type: Application
    Filed: August 29, 2008
    Publication date: March 4, 2010
    Applicant: International Business Machines Corporation
    Inventors: William E. Corbin, JR., Alison K. Easton, James E. Fluegel, Christopher W. Long, James H. Peterman, Laura Mauer
  • Patent number: 6708298
    Abstract: A method for testing the data strobe window (DQS) and data valid window (tDV) of a memory device (e.g., a DDR-type memory device) using the window strobe of a testing system.
    Type: Grant
    Filed: January 23, 2001
    Date of Patent: March 16, 2004
    Assignee: International Business Machines Corporation
    Inventors: William E. Corbin, Jr., David P. Monty, Erik A. Nelson, Alan D. Norris, Steven W. Tomashot, David E. Chapman, Timothy E. Fiscus
  • Patent number: 6471845
    Abstract: A method for controlling the composition of a chemical bath in which predictive dosing is used to account for changes in the composition of the bath in which the operating characteristics of the process are partitioned into a plurality of operating modes and the consumption or generation of materials related to the process are determined empirically and additions of material are made as appropriate.
    Type: Grant
    Filed: December 15, 1999
    Date of Patent: October 29, 2002
    Assignees: International Business Machines Corporation, Novellus Systems, Inc.
    Inventors: John O. Dukovic, William E. Corbin, Jr., Erick G. Walton, Peter S. Locke, Panayotis C. Andricacos, James E. Fluegel, Evan Patton, Jonathan Reid
  • Patent number: 6270646
    Abstract: A metal plating apparatus is described which includes a compressible member having a conductive surface covering substantially all of the surface of the substrate to be plated. The plating current is thereby transmitted over a wide area of the substrate, rather than a few localized contact points. The compressible member is porous so as to absorb the plating solution and transmit the plating solution to the substrate. The wafer and compressible member may rotate with respect to each other. The compressible member may be at cathode potential or may be a passive circuit element.
    Type: Grant
    Filed: December 28, 1999
    Date of Patent: August 7, 2001
    Assignee: International Business Machines Corporation
    Inventors: Erick Gregory Walton, Dean S. Chung, Lara Sandra Collins, William E. Corbin, Jr., Hariklia Deligianni, Daniel Charles Edelstein, James E. Fluegel, Josef Warren Korejwa, Peter S. Locke, Cyprian Emeka Uzoh
  • Patent number: 5865984
    Abstract: Disclosed is an electrochemical etching apparatus including a fixture for holding a workpiece; a nozzle, positioned opposite the fixture and facing the workpiece, for impinging an etchant onto the workpiece; and an electrode for applying a voltage between the electrode and the workpiece; wherein, in operation, one of the fixture and nozzle are rotated and the nozzle is moved radially outwardly so that the workpiece is spirally etched. Also disclosed is a method of spirally etching a workpiece.
    Type: Grant
    Filed: June 30, 1997
    Date of Patent: February 2, 1999
    Assignee: International Business Machines Corporation
    Inventors: William E. Corbin, Jr., Madhav Datta, Thomas E. Dinan, Frederick W. Kern