Patents by Inventor William Gilbert Breingan

William Gilbert Breingan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR DUAL SPEED SPIN CHUCK
    Publication number: 20150037499
    Abstract: A spin chuck according to the present invention is provided and is configured to eliminate the wrap of chemical over the wafer edge. The dual speed wafer spin chuck apparatus acts to prevent liquids from affecting the backside of a wafer during processing. An outer ring is placed around the wafer with a narrow gap between the two such that drops of liquid on the surface of the wafer will touch the outer ring as they move to the outermost edge of the wafer.
    Type: Application
    Filed: July 29, 2014
    Publication date: February 5, 2015
    Inventors: William Gilbert Breingan, James K. Anders, Herman Itzkowitz