Abstract: The present invention provides a standardized mechanical interface (SMIF) reticle pod that is configured to provide a controlled environment for supporting a reticle wherein the controlled environment is maintained substantially free of crystal growth causing contaminants. Accordingly, there is provided a layered filter with filter elements capable of filtering particulates and adsorbing gaseous contaminants. The filter has an inwardly facing face generally planar shaped with a surface area that is substantially half or more of the area of the reticle face. The inwardly facing face is placed in close proximity to the reticle patterned surface and has an area that is a significant fraction of the reticle patterned surface area. The SMIF pod is also provided with a purge system configured to inject a very dry gas within the controlled environment to flush the controlled environment of contaminants as well as to regenerate the filter.

Abstract: A method is disclosed for maintaining a table of recent accesses for each port for use in predicting whether a request for data from a source device is likely to be sent to a high speed or low speed destination device. The table of recent accesses lists every source device attached to that port and the speed of the destination device with the most recent access to each source device. When an OPN primitive is received at the source port, the source device is identified and used with the table of recent accesses to predict whether the destination device is likely to be high speed or low speed, and ultimately whether to send data from the source device or reject the request.

Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

Abstract: A method and apparatus for improving measurement accuracy in a gas monitoring system is provided. The apparatus can be connected to a plurality of gas sample lines each containing a gas sample. The gas samples are routed through a number of delivery channels which are fewer in number than the plurality of sample lines. Each delivery channel is alternatively coupled to a detector which identifies contaminants present in the gas samples. Each delivery channel includes a voltage sensitive orifice (VSO). The VSO's are operated by a controller and provide gas samples at a constant flow and a constant pressure to the detector independent of the length of the gas sample line being measured.

Abstract: The invention provides methods for leveraging data in the graphics pipeline of a 3D graphics application for use in a haptic rendering of a virtual environment. The invention provides methods for repurposing graphical information for haptic rendering. Thus, at least part of the work that would have been performed by a haptic rendering process to provide touch feedback to a user is obviated by work performed by the graphical rendering process.

Abstract: A system for generating processor hardware supports a language for significant extensions to the processor instruction set, where the designer specifies only the semantics of the new instructions and the system generates other logic. The extension language provides for the addition of processor state, including register files, and instructions that operate on that state. The language also provides for new data types to be added to the compiler to represent the state added. It allows separate specification of reference semantics and instruction implementation, and uses this to automate design verification. In addition, the system generates formatted instruction set documentation from the language specification.

Abstract: A six degree of freedom force reflecting haptic interface includes three powered axes and three free axes, all of which are tracked so that the position of a user connection element in the work volume can be determined. The interface includes cable drives with polymer composite or metallic cables, automatic cable tensioning devices, and grounded actuator capstans. A nested hub and transfer drive provide a compact, weight balanced interface. User comfort and safety features are also provided.

Abstract: A six degree of freedom force reflecting haptic interface includes three powered axes and three free axes, all of which are tracked so that the position of a user connection element in the work volume can be determined. The interface includes cable drives with polymer composite or metallic cables, automatic cable tensioning devices, and grounded actuator capstans. A nested hub and transfer drive provide a compact, weight balanced interface. User comfort and safety features are also provided.

Abstract: Systems and methods provide a user the ability to select three-dimensional virtual objects in a three-dimensional modeling environment using two-dimensional representations of the objects. In broad overview, the invention involves a multidimensional degree of freedom haptic interface that controls a three-dimensional cursor. A user employs the cursor to select an arbitrary point on a three-dimensional virtual object of interest. Through the application of a mathematical transformation, the system displays the cursor at the location of the selected point on the object. The user can manipulate the object by operating the haptic interface. The systems and methods provide the user with the possibility of editing the selected virtual object. In one embodiment, editing includes sculpting the object. When the user releases the object after manipulation is completed, the cursor is relocated to the position the cursor would have had had the manipulations been applied to the cursor directly.

Abstract: A digital computer system automatically creates an Instruction Set Architecture (ISA) that potentially exploits VLIW instructions, vector operations, fused operations, and specialized operations with the goal of increasing the performance of a set of applications while keeping hardware cost below a designer specified limit, or with the goal of minimizing hardware cost given a required level of performance.

Abstract: The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.

Abstract: A magnetic inertial force generator includes a magnetic shell internally defining an armature chamber. At least two circumferential electric coils are spaced longitudinally within the chamber and mounted on a cylindrical inner surface of the outer shell. An armature centered by springs is reciprocably supported in the chamber and includes at least two axially spaced radially magnetized permanent magnets mounted on a longitudinally extending magnetic steel tube. The magnets extend in general alignment with the coils. Controlled energizing of the coils reciprocates the armature axially relative to the shell to develop an opposite inertia force on the shell for application to a connected body. The use of multiple radially magnetized magnets provides for improved performance and/or reduced cost.

Abstract: A magnetic force generator includes a magnetic shell internally defining an armature chamber. At least three circumferential electric coils are spaced axially within the chamber. An armature supported in the chamber for reciprocation therein includes a plurality of aligned magnets separated by at least one intermediate magnetic steel plate sandwiched between like poles of adjoining magnets and a pair of end steel magnetic plates on opposite ends of the armature. The plates extend laterally to a periphery of the armature in general lateral alignment with the electric coils. Springs nominally center the armature between non-magnetic ends of the chamber. Controlled energizing of the coils reciprocates the armature axially relative to the shell to develop an opposite inertia force on the shell for application to a connected body. The use of multiple magnets improves performance and/or reduces cost compared to a single magnet of comparable size.

Abstract: The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.

Abstract: A multi-function force reflecting haptic interface including various sub-assemblies is disclosed. The sub-assemblies include multiple function user interfaces, a user interface docking station for setting the interface to a home position, temperature monitoring and control systems, and various kinematic cable drive systems.

Abstract: The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal.

Abstract: A six degree of freedom force reflecting haptic interface includes three powered axes and three free axes, all of which are tracked so that the position of a user connection element in the work volume can be determined. The interface includes cable drives with polymer composite or metallic cables, automatic cable tensioning devices, and grounded actuator capstans. A nested hub and transfer drive provide a compact, weight balanced interface. User comfort and safety features are also provided.

Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

Abstract: In preferred embodiments, the invention provides a gas filter for a reactive gas used in semiconductor processing tools and processes that are sensitive to molecular contamination. The reactive gas filters of the invention have improved pressure drop and can supply an output gas stream having concentrations of less than about 1 ppbv for both ammonia and sulfur dioxide for an input gas stream with ammonia and sulfur dioxide concentrations, respectively, of no greater than about 10 ppbv and 5 ppbv. In one aspect the invention provides a reactive gas filter with an improved pressure drop that can supply an output gas stream having concentrations of less than about 1 ppbv for both ammonia and sulfur dioxide for an input gas stream with ammonia and sulfur dioxide concentrations, respectively, of no greater than about 10 ppbv and 5 ppbv, using a filter media volume of no greater than about 0.5 litters.

Abstract: A medication injector apparatus such as an injection pen. The injection pen includes a resettable, cartridge plunger drive assembly including an axially floating nut, a cartridge plunger engaging screw, and a drive clutch movable with the nut and which when rotated causes the screw to screw through the nut. When a cartridge assembly is mounted to the pen base, the floating nut and drive clutch are shifted proximally such that the drive clutch is in torque transmitting engagement with a rotatable drive member of the pen, such that rotation of that drive member results in drive screw advancement through the nut in the distal direction. When the cartridge assembly is not mounted to the pen base, the floating nut and drive clutch are biased distally to disengage the drive clutch from torque transmitting engagement with the rotatable drive member and to thereby allow the drive screw to be reset proximally through the nut to a position more retracted within the pen base.