Patents by Inventor William Gray Callahan

William Gray Callahan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Technique for uniformity tuning in an ion implanter system
    Patent number: 7355188
    Abstract: A technique for uniformity tuning in an ion implanter system is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for ion beam uniformity tuning. The method may comprise generating an ion beam in an ion implanter system. The method may also comprise tuning one or more beam-line elements in the ion implanter system to reduce changes in a beam spot of the ion beam when the ion beam is scanned along a beam path. The method may further comprise adjusting a velocity profile for scanning the ion beam along the beam path such that the ion beam produces a substantially uniform ion beam profile along the beam path.
    Type: Grant
    Filed: December 15, 2005
    Date of Patent: April 8, 2008
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Joseph C. Olson, Jonathan Gerald England, Morgan D. Evans, Douglas Thomas Fielder, Gregg Alexander Norris, Shengwu Chang, Damian Brennan, William Gray Callahan