Patents by Inventor William Holtkamp

William Holtkamp has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Linearly distributed semiconductor workpiece processing tool
    Patent number: 8398355
    Abstract: A substrate processing apparatus includes a transport chamber capable of holding an isolated atmosphere therein and communicably connected to a charging station for loading and unloading a substrate into the apparatus, a transport system inside the transport chamber for transporting the substrate and an array of processing chamber modules distributed alongside the transport chamber and communicably connected to the transport chamber to allow the substrate to be transferred therebetween.
    Type: Grant
    Filed: May 26, 2006
    Date of Patent: March 19, 2013
    Assignee: Brooks Automation, Inc.
    Inventors: William Holtkamp, Izya Kremerman, Christopher Hofmeister, Richard Pickreign