Abstract: An actuator subsystem for use in a scanning probe microscope (SPM) system having a probe for measuring a sample comprises and actuator and an actuator driving circuit. The actuator operates in the SPM system to generate relative motion between the probe and the sample while the SPM system collects data indicative of a property of the sample. The relative motion includes a range of motion of at least 1 micron. The actuator driving circuit applies a drive signal to the actuator to cause the relative motion, and has a small signal bandwidth of at least 200 kHz with a phase lag of not more than 100 degrees within the small signal bandwidth.

Abstract: An actuator subsystem for use in a scanning probe microscope (SPM) system having a probe for measuring a sample comprises and actuator and an actuator driving circuit. The actuator operates in the SPM system to generate relative motion between the probe and the sample while the SPM system collects data indicative of a property of the sample. The relative motion includes a range of motion of at least 1 micron. The actuator driving circuit applies a drive signal to the actuator to cause the relative motion, and has a small signal bandwidth of at least 200 kHz with a phase lag of not more than 100 degrees within the small signal bandwidth.

Abstract: A method and apparatus for reducing the parachuting of a probe used in an atomic force microscope. The apparatus includes an oscillating probe, a phase detection circuit coupled to the oscillating probe, and a probe drive boosting circuit coupled to the phase detection circuit and the probe, wherein the phase detection circuit detects a reduction of a variation of a phase signal from the probe and the probe drive boosting circuit boosts a signal to the probe based on the phase signal detected by the phase detection circuit to produce a boosted probe drive signal. The phase detection circuit includes a precision full wave rectifier, and an envelope detector coupled to the precision full wave rectifier, wherein the precision full wave rectifier rectifies a phase signal of the probe to produce a rectified phase signal and the envelope detector detects the rectified phase signal to produce an envelope detected signal.

Abstract: A method and apparatus for reducing the parachuting of a probe used in an atomic force microscope. The apparatus includes an oscillating probe, a phase detection circuit coupled to the oscillating probe, and a probe drive boosting circuit coupled to the phase detection circuit and the probe, wherein the phase detection circuit detects a reduction of a variation of a phase signal from the probe and the probe drive boosting circuit boosts a signal to the probe based on the phase signal detected by the phase detection circuit to produce a boosted probe drive signal. The phase detection circuit includes a precision full wave rectifier, and an envelope detector coupled to the precision full wave rectifier, wherein the precision full wave rectifier rectifies a phase signal of the probe to produce a rectified phase signal and the envelope detector detects the rectified phase signal to produce an envelope detected signal.