Abstract: A modular fluid handling system is disclosed and may include a plurality of fluid handling units. Adjacent fluid handling units may be coupled together to form the fluid handling system. The fluid handling system may deliver fluid from at least one fluid source to fluid utilizing equipment. A plurality of fluid passages may be formed from the coupled plurality of fluid handling units, where the diameter of at least one fluid passage may be greater than the diameter of at least one other fluid passage.

Abstract: A fluid handling unit is disclosed and includes a body, a plurality of fluid passage ports formed in the body, and a plurality of orifices formed on surfaces of the body to provide fluid access to the ports from outside the unit. At least two of the orifices may have different cross-sectional areas. A modular fluid handling system is also disclosed and includes a plurality of fluid handling units, wherein adjacent fluid handling units are coupled together to form the fluid handling system. The fluid handling system may deliver fluid from at least one fluid source to fluid utilizing equipment. A plurality of fluid passages may be formed by the fluid handling units, and the diameter of one fluid passage may be greater than the diameter of another fluid passage. At least one control component may be coupled with at least one fluid handling unit.

Abstract: A method for controlling the delivery of vapor from a bubbler containing a supply of chemical fluid through which a carrier gas is bubbled and from which bubbler vapors are delivered in a vapor stream entrained with the carrier gas. In general, the method involves equilibrating the pressure within the head space to that of the chemical fluid fill line to maintain a constant fluid level based on pressure and not relying on conventional level sensors and controllers.

Abstract: In accordance with the present invention, a method and system is described for controlling the delivery of vapor from a bubbler containing a supply of chemical fluid through which a carrier gas is bubbled and from which bubbler vapors are delivered in a vapor stream entrained with the carrier gas. In general, the present invention involves equilibrating the pressure within the head space to that of the chemical fluid fill line, thus maintaining a constant fluid level based on pressure and not relying on conventional level sensors and controllers.

Abstract: In accordance with the present invention, a method and system is described for controlling the delivery of vapor from a bubbler containing a supply of chemical fluid through which a carrier gas is bubbled and from which bubbler vapors are delivered in a vapor stream entrained with the carrier gas. In general, the present invention involves equilibrating the pressure within the head space to that of the chemical fluid fill line, thus maintaining a constant fluid level based on pressure and not relying on conventional level sensors and controllers.

Abstract: A modular fluid handling assembly includes a plurality of fluid handling units. Each fluid handling unit includes a fluid passage and associated port, a vacuum passage and associated port, a vacuum pressure source, and a containment seal. The fluid passage ports and vacuum passage ports of adjacent fluid handling units respectively communicate. The containment seal is disposed between adjacent fluid handling units and surrounds the communicating fluid passage ports and vacuum passage ports. The vacuum pressure source is in continuous communication with the vacuum passages of the fluid handling units, generates an urging force which aids in sealing adjacent fluid handling units together, and draws off any fluid that may leak from a fluid passage port. A sensor can be tapped into the vacuum line to sense whether any fluid has leaked from a fluid passage port.

Abstract: The heat energy in a reactor used to process substrates is controlled to allow a more accurate measurement of the substrate temperature. The method of substrate temperature measurement is applicable to any reactor geometry and any type of heat source. Further, the method does not affect the process and so the performance of the reactor is unaffected when the substrate temperature measurement method is utilized. At a first predetermined time t1 during the process cycle, power to the heat source is turned off. At a second predetermined time t2, i.e., at the end of a time interval after the power is turned off, the heat energy from the reactor is measured for a predefined time interval, i.e., from second predetermined time t2 to a third predetermined time t3. After the measurement, i.e., at a fourth predetermined time t4, the power to the heat source is turned-on again and the process cycle continues. The time window over which the power is turned-off, i.e.

Abstract: A variable segmented ramp voltage synthesizer is disclosed as including a ster pulse generator and a plurality of series connected one-shot multivibrators connected to the output thereof for producing a like plurality of gating signals. In response to said gating signals, a like plurality of successively increasing voltages, effected by a given positive direct current voltage source and appropriately different resistances, are gated into a constant current generator. The output signal from said constant current generator is substantially stair-step in waveform, and it is supplied to a predetermined, relatively large capacitance for the charging thereof with respect to another direct current voltage that is more negative than the aforementioned positive direct current voltage.