Patents by Inventor William J. O'Banion

William J. O'Banion has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing chamber with optical fiber with bragg grating sensors
    Patent number: 11901165
    Abstract: An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.
    Type: Grant
    Filed: November 19, 2020
    Date of Patent: February 13, 2024
    Inventors: William J. O'Banion, An-Dien Nguyen, Huy D. Nguyen
  • TEST WAFER WITH OPTICAL FIBER WITH BRAGG GRATING SENSORS
    Publication number: 20210118654
    Abstract: An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.
    Type: Application
    Filed: November 11, 2020
    Publication date: April 22, 2021
    Inventors: William J. O'Banion, IV, An-Dien Nguyen, Huy D. Nguyen
  • PROCESSING CHAMBER WITH OPTICAL FIBER WITH BRAGG GRATING SENSORS
    Publication number: 20210090865
    Abstract: An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.
    Type: Application
    Filed: November 19, 2020
    Publication date: March 25, 2021
    Inventors: William J. O'Banion, An-Dien Nguyen, Huy D. Nguyen
  • Test wafer with optical fiber with Bragg Grating sensors
    Patent number: 10861682
    Abstract: An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.
    Type: Grant
    Filed: July 16, 2018
    Date of Patent: December 8, 2020
    Assignee: iSenseCloud, Inc.
    Inventors: William J. O'Banion, An-Dien Nguyen, Huy D. Nguyen
  • Test Wafer With Optical Fiber With Bragg Grating Sensors
    Publication number: 20190006157
    Abstract: An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.
    Type: Application
    Filed: July 16, 2018
    Publication date: January 3, 2019
    Inventors: William J. O'Banion, An-Dien Nguyen, Huy D. Nguyen