Patents by Inventor William K. Sterrett

William K. Sterrett has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS Fabrication Method
    Publication number: 20090081828
    Abstract: The present invention provides methods for singulating microelectromechanical systems (MEMS) die from a wafer. A plurality of MEMS devices are formed on the top surface of a wafer, and a plurality of intersecting scribe lanes are then formed, on the bottom surface of the wafer, to define a plurality of dies, each including at least one MEMS device. The intersecting scribe lanes penetrate the wafer to a depth of about 80%, and the wafer is cleaved along the scribe lanes to separate each of the plurality of dies from the wafer.
    Type: Application
    Filed: September 26, 2007
    Publication date: March 26, 2009
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: Carl B. Freidhoff, Silai V. Krishnaswamy, William K. Sterrett