Patents by Inventor William Kuo

William Kuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Film treatment method preventing blocked etch of low-K dielectrics
    Publication number: 20060205232
    Abstract: A method for etching a dielectric material in a semiconductor device is disclosed. After providing a conductive region, a dielectric layer is formed over the conductive region. A dielectric antireflective coating (DARC) layer is further formed on the dielectric layer. Then, a moisture-removal step is performed that removes moisture from the DARC layer and from an interface region between the dielectric and the DARC layer. A masking pattern is transferred into the DARC layer and the dielectric layer.
    Type: Application
    Filed: March 10, 2005
    Publication date: September 14, 2006
    Inventors: Lih-Ping Li, Tzong-Sheng Chang, William Kuo, Tsung-Hsien Lee, Chun-Lin Tsai, Szu-An Wu, Yin-Ping Lee