Abstract: A cartridge can comprise a first elastomeric membrane and a second elastomeric membrane, and portions of the elastomeric membranes which are sealed to each other can circumscribe unsealed portions of the membranes. In a resting state, the unsealed portion of the first elastomeric membrane abuts or is proximate to the unsealed portion of the second elastomeric membrane. One or more reagents can be injected between the unsealed portions of the first and second elastomeric membranes to push the unsealed portions apart from each other in this region of the membranes. The unsealed portions can be sequentially pushed apart in downstream regions to form a channel between the elastomeric membranes. Positively displaced fluid pushes the unsealed membrane portions apart to a volume that conforms to the volume of the fluid to minimize or prevent dead volume in the channel and thus minimize or prevent air bubbles in the fluid.

Abstract: A baseplate for a substrate support includes a heater layer configured to selectively heat the baseplate and a heat spreader disposed between the heater layer and an upper surface of the baseplate. The heat spreader is configured to distribute heat provided by the heater layer throughout the baseplate. The baseplate includes a first material that has a first coefficient of thermal expansion (CTE) and a first thermal conductivity. The heat spreader includes a second material that has a second CTE and a second thermal conductivity greater than the first thermal conductivity.

Abstract: A device for positioning the tip of an elongated probe (14) at a selected station of a holding plate (12) includes motors to move the holding plate and a supporting stage within a coordinate plane (mxy). The elongated probe is also movable along a linear probe axis that is orientated normal to the coordinate plane (mxy). A camera creates a pixel image of an optical marker placed on the stage. The image defines a coordinate plane (pxy). To relate the coordinate plane (pxy) to the coordinate plane (mxy), the optical marker is moved to successive locations in the mxy plane and a pixel image is obtained at each location. Using the pixel images, a computer calculates the relationship between coordinate planes and uses the relationship to signal the motors to move the holding plate in the mxy plane and position the selected station on the probe axis for interaction with the probe.