Abstract: A high frequency semiconductor component (10) includes a first substrate (12) having a first surface (13) opposite a second surface (14), a first electrically conductive layer (16) supported by the first surface (13) of the first substrate (12), a second electrically conductive layer (17) supported by the second surface (14) of the first substrate (12) wherein the second electrically conductive layer (17) is electrically coupled to the first electrically conductive layer (16), a second substrate (19) having a first surface (20) and a second surface (21), a third electrically conductive layer (22) supported by the first surface (20) of the second substrate (19), and an electrically insulating layer (23) between the second and third electrically conductive layers (17, 22) wherein the second and third electrically conductive layers (17, 22) are electrically coupled together through the electrically insulating layer (23).

Abstract: A high frequency transition (10) from a microstrip transmission line (57) to an MMIC coplanar waveguide (41) is provided. The microstrip transmission line (57) is representative of that typically encountered in a high frequency RF module on a first substrate (11). The MMIC coplanar waveguide (41) is representative of that encountered in low cost MMICs fabricated on a semiconductor substrate (56). An interface (15) couples the microstrip transmission line (57) to a mode converter (16). Mode converter (16) provides impedance mismatch compensation and coplanar waveguide propagation mode conditions for a connector coplanar waveguide (34) which connects from the first substrate (11) to the semiconductor substrate (56). An impedance transformer (40) provides additional impedance mismatch compensation on the semiconductor substrate (39) to complete the transition.