Abstract: A semiconductor wafer processing system for processing a semiconductor wafer includes a semiconductor wafer processing station for processing the semiconductor wafer and a semiconductor wafer imaging system that images the semiconductor wafer after the semiconductor wafer processing station processes the semiconductor wafer. The semiconductor wafer imaging system includes shroud panels defining a black box, a camera positioned in the black box for imaging the semiconductor wafer, and an illumination panel for directing diffuse light to the semiconductor wafer. A portion of the diffuse light is reflected off the semiconductor wafer and the camera images the semiconductor wafer by detecting the reflected diffuse light.

Abstract: Disclosed is a robot apparatus with a capable and highly maneuverable drive system incorporating two differential swerve drive pods. The robot apparatus further includes a claw mechanism for grasping an object, a passthrough mechanism for moving the object horizontally and a lift mechanism for moving the object vertically. The robot apparatus allows for rapid manipulation and movement of objects such as cones.

Abstract: A semiconductor wafer imaging system for imaging a semiconductor wafer includes shroud panels defining a black box, a camera positioned in the black box for imaging the semiconductor wafer, and an illumination panel for directing diffuse light to the semiconductor wafer. A portion of the diffuse light is reflected off the semiconductor wafer and the camera images the semiconductor wafer by detecting the reflected diffuse light.

Abstract: Disclosed is a system for controlling a robot via a foot-operable controller. The foot-operable controller includes a grid of large pressure-sensitive tiles that are responsive to being stepped on. Signals from the pressure-sensitive tiles are provided to a controller interface that converts the signals to control messages compatible with existing robot control interfaces, such as a universal serial bus. The foot-operable controller may be used to control various robots, including for example a robot equipped with a claw arm or a robot equipped with a ring launcher.

Abstract: Disclosed is a decontamination robot. The robot includes a decontamination box including at least two arrays of ultraviolet LEDs, the two arrays arranged to irradiate an object placed inside the decontamination box from at least two independent directions, the decontamination box further including an interior surface with at least 90% reflectivity of ultraviolet light. The robot also includes a drivetrain including four swerve-drive units, each swerve-drive unit capable of rotating a wheel on an axis of the wheel and capable of orienting the wheel in a plane defined by the axes of the four wheels of the four swerve-drive units, whereby the four swerve-drive units coordinate to generate translational motion of the decontamination robot on a working surface.