Abstract: A method provides improved alignment for a photolithographic exposure. In such method, a first exposure tool and a first chuck used in a reference photolithographic exposure of a first material layer on a substrate can be identified. The substrate typically includes at least a semiconductor layer. The first chuck typically is one of a plurality of chucks usable with the first exposure tool. The method may further include identifying a second exposure tool and a second chuck used in a current photolithographic exposure of a second material layer on the substrate. In one embodiment, alignment correction information specific to each of the identified first exposure tool, the first chuck, the second exposure tool and the second chuck can be used in aligning the semiconductor substrate to a second exposure tool and a second chuck.

Abstract: A method provides improved alignment for a photolithographic exposure. In such method, a first exposure tool and a first chuck used in a reference photolithographic exposure of a first material layer on a substrate can be identified. The substrate typically includes at least a semiconductor layer. The first chuck typically is one of a plurality of chucks usable with the first exposure tool. The method may further include identifying a second exposure tool and a second chuck used in a current photolithographic exposure of a second material layer on the substrate. In one embodiment, alignment correction information specific to each of the identified first exposure tool, the first chuck, the second exposure tool and the second chuck can be used in aligning the semiconductor substrate to a second exposure tool and a second chuck.

Abstract: A support member for an inclined open mesh or wire type shelf that can be spaced anywhere along a wall and shelf area to provide support for the inclined shelf. The support is a one piece molded structure having a T-type cross-section with the shank having curved lower and upper ends with those curves providing about a 60.degree. angle of inclination for the shelf. One end includes a flat surface for engaging the wall with the other end including a forwardly directed groove for receiving a crosswise support in the middle of the shelf and a pair of grooves extending perpendicular to that forwardly directed groove sized so that that end of the support can snap in place between two stringers within the shelf structure.