Abstract: A pre-ionizing system in which the pre-ionizer elements are integral with the cathode insulating plate is provided. The cathode insulating plate includes a recessed region machined into the front surface into which the cathode fits, lying substantially flush with the insulator front surface. The back surface of the insulating plate contains a pair of slots running parallel to the long axis of the cathode. The pre-ionizing rods are located within these slots, the slots having sufficient depth to locate the rods approximately adjacent to the cathode. By maintaining the rods at ground, a capacitor is formed in which the insulating plate material between the rod and the cathode acts as the dielectric material of the capacitor. When a voltage pulse is applied, a capacitive corona discharge is formed which pre-ionizes the gases in the region near the cathode.

Abstract: An excimer laser chamber capable of arc-free operation at repetitive pulse rates of 1 kHz or greater is provided. The chamber balances the electrode design criteria required to produce a well-defined discharge channel with the flow design criteria required to achieve high clearing rates at comparatively high blower efficiency. A ceramic insulator located on either side of the cathode/pre-ionizer assembly enhances the flow of gas through the discharge region by reducing the turbulence in the electrode region. A series of specifically designed flow vanes further enhance the gas flow. The gas exiting the blower fan is guided into the discharge region with one vane. The anode support bar is extended downwardly, thus improving the efficiency of the tangential blower and also minimizing the amount of gas bypassing the discharge region. A pair of vanes downstream from the discharge region smoothly direct the heated gas towards the heat exchanger.

Abstract: A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. A working gas supply system supplies a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source for provides electrical pulses at a frequency of at least 100 Hz and a voltages high enough to create electrical discharge between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the active gas. An external reflection radiation collector-director collects radiation produced in the plasma pinches and directs the radiation in a desired direction. In a preferred embodiment the active gas is lithium and the buffer gas is helium and the radiation-collector is coated with the material used for the electrodes. That material is tungsten.