Abstract: A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube.

Abstract: A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube.

Abstract: A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube.

Abstract: A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube.

Abstract: A dot matrix line printer comprised of a main frame assembly and a shuttle frame assembly hinged thereto for limited pivotal movement around a horizontal hinge axis. The main frame assembly carries a paper drive subassembly and an adjustable platen subassembly. The shuttle frame assembly carries one or more hammer banks and a shuttle drive motor for shuttling each bank to move the hammers thereof along a print row extending across the width of the paper parallel to the front face of the platen. By pivoting the shuttle frame assembly up and away from the main assembly, ready access is afforded to the paper path for loading and to the hammer banks for servicing. Each hammer includes a hammer element mounted on the free ends of first and second spaced parallel leaf springs for linear movement toward and away from a paper to be printed upon. The parallel leaf springs are anchored at one end and biased to impact the hammer element against the paper.

Abstract: A dot matrix line printer comprised of a main frame assembly and a shuttle frame assembly hinged thereto for limited pivotal movement around a horizontal hinge axis. The main frame assembly carries a paper drive subassembly and an adjustable platen subassembly. The shuttle frame assembly carries one or more hammer banks and a shuttle drive motor for shuttling each bank to move the hammers thereof along a print row extending across the width of the paper parallel to the front face of the platen. By pivoting the shuttle frame assembly up and away from the main assembly, ready access is afforded to the paper path for loading and to the hammer banks for servicing. Each hammer includes a hammer element mounted on the free ends of first and second spaced parallel leaf springs for linear movement toward and away from a paper to be printed upon.