Patents by Inventor William Parrette

William Parrette has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for control of contamination in spin systems
    Patent number: 5725663
    Abstract: A substrate wafer processing method and apparatus is disclosed utilizing a bowl having a central axis, a baffle surface positioned above the inside bottom surface of the bowl and a chuck member having a top surface for supporting and spinning substrate and positionable coaxially within the bowl closely spaced from the baffle surface. Means and methods are described for directing a gas stream radially outwardly between the bottom surface of the chuck member and the baffle. The specific surface construction of the baffle is disclosed as part of a plenum member as well as a deflecting surface that projects to a level above the top surface of the substrate.
    Type: Grant
    Filed: January 31, 1996
    Date of Patent: March 10, 1998
    Assignee: Solitec Wafer Processing, Inc.
    Inventor: William Parrette