Abstract: A monolithic or dual monolithic magnetic device or apparatus having an array of formations such as protruding or raised nubs wherein adjacent nubs have the same or opposite polarity to produce a high magnetic field gradient in the vicinity of the nubs is described. In lieu of nubs, the use of a magnetic device with thru-holes, blind holes, filled holes, or iron flux concentrators is also detailed, wherein all embodiments result in regions of high magnetic field gradient. Apparatus and methods for spot-poling a magnet array are also illustrated. An application of an array of MEMS actuators using the magnets of the present invention to produce high field gradient at precise locations is described. A further application of a biochemical separation unit containing a magnetic array and micro-fluidic channels for separating out magnetic particles tagged with bio-specific molecules for sensing the presence of a disease or specified chemicals is also described.

Abstract: One embodiment is directed to a mirror device (for a device such as an optical switch, scanner or projector) having a movable mirror structure with an attached magnet. The mirror structure is movably mounted on a base structure, which includes an actuation coil for controlling movement of the mirror structure. Another embodiment is directed to a mirror device (in a device such as an optical switch, scanner or projector) having a high mirror fill factor. The device includes a mirror mounted on a support member, which is connected to a gimbal frame. The support member includes an enlarged portion configured to at least partially extend over the gimbal frame. The mirror substantially covers the enlarged portion of the support member, thereby providing the device with a high mirror fill factor. A further embodiment is directed to a mirror support structure for a movable mirror device (in a device such as an optical switch, scanner or projector).

Abstract: An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.

Abstract: Methods and apparatus are provided for sealing and reducing warpage in a microsystem device. The microsystem device is assembled with a substrate and packaged.

Abstract: A monolithic or dual monolithic magnetic device or apparatus having an array of formations such as protruding or raised nubs wherein adjacent nubs have the same or opposite polarity to produce a high magnetic field gradient in the vicinity of the nubs is described. In lieu of nubs, the use of a magnetic device with thru-holes, blind holes, filled holes, or iron flux concentrators is also detailed, wherein all embodiments result in regions of high magnetic field gradient. Apparatus and methods for spot-poling a magnet array are also illustrated.

Abstract: One embodiment is directed to a mirror device (for a device such as an optical switch, scanner or projector) having a movable mirror structure with an attached magnet. The mirror structure is movably mounted on a base structure, which includes an actuation coil for controlling movement of the mirror structure. Another embodiment is directed to a mirror device (in a device such as an optical switch, scanner or projector) having a high mirror fill factor. The device includes a mirror mounted on a support member, which is connected to a gimbal frame. The support member includes an enlarged portion configured to at least partially extend over the gimbal frame. The mirror substantially covers the enlarged portion of the support member, thereby providing the device with a high mirror fill factor. A further embodiment is directed to a mirror support structure for a movable mirror device (in a device such as an optical switch, scanner or projector).

Abstract: An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.