Abstract: In one embodiment, a lidar system includes a wavelength-tunable light source configured to emit pulses of light, each emitted pulse of light having a particular wavelength of multiple different wavelengths. The lidar system also includes a scanner configured to scan the emitted pulses of light across a field of regard of the lidar system. The scanner includes (i) a beam deflector configured to angularly deflect each emitted pulse of light along a first scan axis according to the particular wavelength of the emitted pulse of light and (ii) a scan mirror configured to scan the emitted pulses of light along a second scan axis different from the first scan axis. The lidar system further includes a receiver configured to detect a received pulse of light that includes a portion of one of the emitted pulses of light scattered by a target located a distance from the lidar system.

Abstract: In one embodiment, a lidar system includes a light source configured to emit pulses of light and a scanner configured to scan the emitted pulses of light across a field of regard of the lidar system. The scanner includes (i) a beam deflector configured to direct each emitted pulse of light along a first scan axis and (ii) a scan mirror configured to scan the emitted pulses of light along a second scan axis different from the first scan axis. The lidar system also includes a receiver that includes a one-dimensional detector array that includes multiple detector elements arranged along a direction corresponding to the first scan axis. The receiver is configured to (i) detect a received pulse of light that includes a portion of one of the emitted pulses of light scattered by a target and (ii) determine a time of arrival of the received pulse of light.

Abstract: Techniques for predicting failure of a storage device are described in various implementations. An example method that implements the techniques may include receiving, at an analysis system and from a computing system having a storage device, current diagnostic information associated with the storage device. The method may also include storing, using the analysis system, the current diagnostic information in a collection that includes historical diagnostic information associated with other storage devices of other computing systems. The method may also include predicting, using the analysis system, whether the storage device is likely to fail in a given time period based on the current diagnostic information and an estimated lifespan for storage devices that are of a same classification as the storage device, the estimated lifespan determined based on the collection.

Abstract: A computer performs a backup operation copying user files and system files to a separate backup system for persistent storage. The system files include restore-point files from a system area of a source system storage device, the restore-point files created by the computer's operating system and being copies of constituent files of the operating system at a point in time. In a subsequent restoration operation, the computer is operated in a limited-functionality recovery mode including (a) executing a recovery program from a recovery storage device to restore the restore-point files from the recovery storage device to a system area of a target system storage device, and (b) executing a system restore function with selected restored restore-point files to restore the operating system.

Abstract: A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

Abstract: An integrated pressure and flow ratio control system includes N mass flow controllers MFCi (i=1, . . . , N) that each control the flow rate of a fluid Fi (i=1, . . . , N) flowing into a processing chamber. These N mass flow controllers are linked together by a digital communication network. One of the mass flow controllers is a master MFC, and the remaining N?1 MFCs are slave MFCs. The master MFC receives a pressure set point and a plurality N of flow ratio set points from a host controller, and communicates these set points to all the slave MFCs. In this way, the pressure in the chamber is maintained at the pressure set point and the flow ratios Qi/QT are maintained at the flow ratio set points, where Qi is flow rate of the i-th fluid Fi, and QT=Q1+Q2+ . . . QN is the sum of all N flow rates.

Abstract: A system for delivering pulses of a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber. A controller is programmed to receive the desired mass for each pulse through an input interface, close the second valve and open the first valve, receive chamber pressure measurements from a pressure transducer, and close the first valve when pressure within the chamber rises to a predetermined upper level. The controller is also programmed to deliver pulses of gas using just the second valve, wherein, for each pulse, the second valve is opened until a calculated mass for the pulse equals the desired mass for the pulse. The first valve is not required to be opened and closed for each pulse and is, therefore, used less frequently and has an extended life.

Abstract: A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

Abstract: A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

Abstract: An integrated pressure and flow ratio control system includes N mass flow controllers MFCi (i=1, . . . , N) that each control the flow rate of a fluid Fi (i=1, . . . , N) flowing into a processing chamber. These N mass flow controllers are linked together by a digital communication network. One of the mass flow controllers is a master MFC, and the remaining N-1 MFCs are slave MFCs. The master MFC receives a pressure set point and a plurality N of flow ratio set points from a host controller, and communicates these set points to all the slave MFCs. In this way, the pressure in the chamber is maintained at the pressure set point and the flow ratios Qi/QT are maintained at the flow ratio set points, where Qi is flow rate of the i-th fluid Fi, and QT=Q1+Q2+ . . . QN is the sum of all N flow rates.

Abstract: A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.

Abstract: A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.

Abstract: An avalanche photodiode (APD) includes an absorption layer above the multiplication layer, where the thickness of the multiplication layer is defined through a growth process. The APD can also have a third-terminal, or peripheral ring terminal, for collecting charge carriers generated outside the optically-active region of the device. Undesirable dark current can thus be better managed during the life of the device. The three-terminal design may also be utilized in other photodetectors, including PIN diodes.

Abstract: An avalanche photodiode (APD) includes an absorption layer above the multiplication layer, where the thickness of the multiplication layer is defined through a growth process. The APD can also have a third-terminal, or peripheral ring terminal, for collecting charge carriers generated outside the optically-active region of the device. Undesirable dark current can thus be better managed during the life of the device. The three-terminal design may also be utilized in other photodetectors, including PIN diodes.

Abstract: A valve assembly includes a valve with a bobbin/valve body, a solenoid and a plunger. The bobbin/valve body is formed in one piece, and defines all of the valve's inlet/outlet ports and forms the entire support structure for the solenoid and the plunger. The valve may be connected to a manifold by press-fitting port nipples of the valve into corresponding channels in the manifold. The manifold is formed of a resilient, elastomeric material, and the port nipples include radial projecting barbs, which enable the valve to be fluidly-connected to the manifold without additional O-ring seals or other mechanical sealing devices. Fittings with barbs can likewise be press-fit in other channels of the manifold to connect the valve assembly with fluid lines or other components in the fluid system. The fittings can also be provided unitary with the manifold, and/or adhesively attached to the manifold and/or to the fluid lines and other components.

Abstract: A photodiode, and method of manufacturing thereof, is provided which combines advantages of planar structure photodiodes and mesa structure photodiodes. Semiconductor layers are epitaxially grown as is done for traditional planar structures. However the upper doped layer is also epitaxially grown, unlike traditional planar structures in which the upper layer is formed by diffusion depth targeting into one of the intrinsically doped layers. The edges of the upper layer are then removed by etching to leave an island-like structure. Termination junctions are formed by deep diffusion of an impurity of the same type as the dopant in the lower doped layer, thereby avoiding exposure of the edges of the photodiode to the ambient environment. The photodiode therefore combines the reliability of a planar structure device with the precision of a mesa structure device. The invention is particularly suited to avalanche photodiodes, in which suppression of edge breakdown is most beneficial.

Abstract: A system for dividing a single flow of gas into two or more secondary flows of known, precise values, without requiring a high upstream pressure. The system includes an inlet for receiving the single gas flow, and first and second flow lines connected to the inlet. A mass flow meter measures gas flow through the first line and provides a signal indicative of the measured flow rate. A restrictor restricts gas flow through the first line to a desired flow rate, and has a smallest cross-sectional flow area selected to provide an upstream pressure high enough to allow the mass flow meter to operate properly and lower than a predetermined upper pressure limit. A mass flow controller receives the signal indicative of the measured flow rate from the mass flow meter and maintains a flow rate through the second line based on the signal.

Abstract: A photodiode, and method of manufacturing thereof, is provided which combines advantages of planar structure photodiodes and mesa structure photodiodes. Semiconductor layers are epitaxially grown as is done for traditional planar structures. However the upper doped layer is also epitaxially grown, unlike traditional planar structures in which the upper layer is formed by diffusion depth targeting into one of the intrinsically doped layers. The edges of the upper layer are then removed by etching to leave an island-like structure. Termination junctions are formed by deep diffusion of an impurity of the same type as the dopant in the lower doped layer, thereby avoiding exposure of the edges of the photodiode to the ambient environment. The photodiode therefore combines the reliability of a planar structure device with the precision of a mesa structure device. The invention is particularly suited to avalanche photodiodes, in which suppression of edge breakdown is most beneficial.

Abstract: An improved linearized flow control valve assembly maintains a substantially consistent linear relationship between the input driving device (e.g., motor shaft) and the throughput of fluid through a valved passageway and the angle of the valve member within the passageway. Additionally, an improved linearized flow control valve assembly includes a valve position detector and signal generator which determines the position of the valve member and produces a signal representative of said position. The valve position detector and signal generator is adapted to interface with the linearizing mechanism of the valve assembly and generate the output signal as a function of a linear displacement associated with the linearizing mechanism.

Abstract: A valve assembly includes a valve with a bobbin/valve body, a solenoid and a plunger. The bobbin/valve body is formed in one piece, and defines all of the valve's inlet/outlet ports and forms the entire support structure for the solenoid and the plunger. The valve may be connected to a manifold by press-fitting port nipples of the valve into corresponding channels in the manifold. The manifold is formed of a resilient, elastomeric material, and the port nipples include radial projecting barbs, which enable the valve to be fluidly-connected to the manifold without additional O-ring seals or other mechanical sealing devices. Fittings with barbs can likewise be press-fit in other channels of the manifold to connect the valve assembly with fluid lines or other components in the fluid system. The fittings can also be provided unitary with the manifold, and/or adhesively attached to the manifold and/or to the fluid lines and other components.