Abstract: A boat used in a chemical vapor deposition (CVD) furnace is configured to hold one or more complex three-dimensional (3D) structures when performing a coating. A platform wafer is placed horizontally in the boat to support the complex 3D structures and a mount is positioned to secure the complex 3D structures on the platform wafer during the CVD process. One or more “witness” wafers may also be placed in the boat for analyzing the thin-film coating. The platform wafer may be positioned between or bracketed by the vertical wafers. Parts with coatings manufactured using LPCVD are further disclosed.

Abstract: The air bag safety system is a self-contained, modular apparatus including: an inflatable bag, an inflating unit connected to the bag, and a sensor. The inflating unit provides gas for inflating the bag. The sensor is disposed adjacent to the apparatus and is responsive to a predetermined level of deceleration of a vehicle for activating the inflating unit. The system also includes a fail-safe interlock to prevent the sensor from activating the inflating unit when the system is not properly mounted or internal parts fail in service.