Patents by Inventor William Runstadler, Jr.

William Runstadler, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High throughput load lock for solar wafers
    Patent number: 8998553
    Abstract: A system for transporting substrates from an atmospheric pressure to high vacuum pressure and comprising: a rough vacuum chamber having an entry valve and an exit opening; a high vacuum chamber having an entry opening, the high vacuum chamber coupled to the rough vacuum chamber such that the exit opening and the entry opening are aligned; a valve situated between the exit opening and the entry opening; a first conveyor belt provided in the rough vacuum chamber; a second conveyor provided in the high vacuum chamber; a sensing element provided in the high vacuum chamber to enable detection of broken substrates on the second conveyor; and, a mechanism provided on the second conveyor belt enabling dumping of broken substrates onto the bottom of the high vacuum chamber.
    Type: Grant
    Filed: December 7, 2012
    Date of Patent: April 7, 2015
    Assignee: Intevac, Inc.
    Inventors: Vinay Shah, William Runstadler, Jr., Kevin P. Fairbairn, Terry Bluck, Richard Henry Cooke